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Preparation and Chemical Investigation of Porous Silicon

Published online by Cambridge University Press:  28 February 2011

S. Poulin ,
Y. Diawara ,
J. F. Currie ,
A. Yelon ,
S. C. Gujrathi  and
V. Petrova-Koch
S. Poulin
Affiliation:
Ecole Polytechnique, Département de génie physique, Groupe des Couches Minces, C.P. 6079, Succ. A, Montréal, Qc, Canada, H3C 3A7.
Y. Diawara
Affiliation:
Ecole Polytechnique, Département de génie physique, Groupe des Couches Minces, C.P. 6079, Succ. A, Montréal, Qc, Canada, H3C 3A7.
J. F. Currie
Affiliation:
Ecole Polytechnique, Département de génie physique, Groupe des Couches Minces, C.P. 6079, Succ. A, Montréal, Qc, Canada, H3C 3A7.
A. Yelon
Affiliation:
Ecole Polytechnique, Département de génie physique, Groupe des Couches Minces, C.P. 6079, Succ. A, Montréal, Qc, Canada, H3C 3A7.
S. C. Gujrathi
Affiliation:
Université de Montréal, Departement de physique, Groupe des Couches Minces, C.P. 6128, SuccA, Montréal, Qc, Canada, H3C 3J7.
V. Petrova-Koch
Affiliation:
Physik-Department E 16, Tech. Univ. Munchen, 8046 Garching, Germany.
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Abstract

We have begun a systematic study of the chemistry of light emitting porous Si (LEPOS) using X-ray photoemission spectroscopy and time-of-flight elastic recoil nuclear scattering. The relation of chemical composition to preparation parameters and its evolution with rapid thermal annealing in N2:H2 and in vacuum were studied. The relation between chemical and photoluminescence properties and stability was investigated. The composition of LEPOS is extremely sensitive to preparation conditions and to subsequent treatment. The concentration of C and F in addition to Si, H and O vary with thermal treatment conditions and with time after preparation. However, preparation under the cleanest possible conditions increase both reproducibility and stability.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 283: Symposium F – Microcrystalline Semiconductors–Materials Science and Devices , 1992 , 83
Copyright
Copyright © Materials Research Society 1993

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References

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