Skip to main content Accessibility help
×
Home

Predictive Surface Kinetic Analysis: The Case of TiSi2 CVD

  • M. A. Mendicino (a1), R. P. Southwell (a1) and E. G. Seebauer (a1)

Abstract

Recently, TiSi2 has been the object of considerable study because of its low resistivity among the transition metal silicides and its compatibility with existing ULSI technology [1,2]. Film growth by CVD offers the potential for selective area deposition and high production throughput. However, selective CVD of TiSi2 from gas phase SiH4 and TiCl4 is usually accompanied by a competing reaction which consumes intolerable amounts of the Si substrate [3,4]. Controlling this consumption is crucial in TiSi2 growth; however, no quantitative correlation exists between silicon consumption and growth conditions or film thickness. Additionally, the reaction mechanism for TiSi2 growth is poorly understood, and some disagreement even exists about the reaction stoichiometry [5,6]. The combined CVD/UHV approach we have developed fills many gaps in the current understanding of TiSi2 CVD.

Copyright

References

Hide All
[1] Murarka, S.P., Silicides for VLSI Applications, (New York, Academic), 1983.
[2] Murarka, S.P., J. Vac. Sci. Technol., vol. B4, p. 1325, 1986.
[3] Bouteville, A., Remy, J.C. and Attuyt, C., J. Electrochem. Soc., vol. 139, p. 2260, 1992
[4] Lee, J. and Reif, R., J. Electron. Mater., vol 20, p. 331, 1991
[5] Reynolds, G.J., Cooper, C.B. III and Gaczi, P.J., J. Appl. Phys., vol 65, p. 3212, 1989
[6] Ilderem, V., Reif, R., J. Electrochem. Soc., vol 135, p. 2590, 1988
[7] Müiller-Markgraf, W. and Rossi, M.J., Rev. Sci. Instrum., vol. 61, p. 1217, 1990.
[8] Corcoran, Y.L, King, A.H., deLanerolle, N., and Kim, B., J. Electron Mater., vol. 19, p. 1177, 1990.

Predictive Surface Kinetic Analysis: The Case of TiSi2 CVD

  • M. A. Mendicino (a1), R. P. Southwell (a1) and E. G. Seebauer (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed