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Pre-Cracking and Plasma Enhanced Metalorganic Chemical Vapor Deposition Processes for Epitaxial Hg1−xCdxTe and HgTe-CdTe Superlattice Growth

  • P.-Y. Lu (a1), L. M. Williams (a1), C.-H. Wang (a1), S. N. G. Chu (a1) and M. H. Ross (a1)...

Abstract

Two low temperature metalorganic chemical vapor deposition growth techniques, the pre-cracking method and the plasma enhanced method, will be discussed. The pre-cracking technique enables one to grow high quality epitaxial Hg1−xCdxTe on CdTe or CdZnTe substrates at temperatures around 200–250°C. HgTe-CdTe superlattices with sharp interfaces have also been fabricated. Furthermore, for the first time, we have demonstrated that ternary Hg1−xCdTe compounds and HgTe-CdTe superlattices can be successfully grown by the plasma enhanced process at temperatures as low as 135 to 150°C. Material properties such as surface morphology, infrared transmission, Hall mobility, and interface sharpness will be presented.

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1. Hoke, W. E. and Lemonias, P. J., Appl. Phys. Lett. 46, 398 (1985).
2. Irvine, S. J. C., Mullin, J. B., and Tunnicliffe, J., J. Crystal Growth 68, 188 (1984).
3. Hoke, W. E. and Lemonias, P. J., Appl. Phys. Lett. 48, 1689 (1986).
4. Ahlgren, W. L., James, J. B., Ruth, R. P., Patten, E. A., and Staudenmann, J. L., Mat. Res. Soc. Symp. Proc. 90, 405 (1986).
5. Wang, C.-H., Lu, P.-Y., & Williams, L.M., Appl. Phys. Lett. 48, 1085, (1986).
6. Lu, P.-Y., Wang, C.-H., Williams, L.M., Chu, S.N.G., & Stiles, C.M., Appl. Phys. Lett. 49, 1372, (1986).
7. Lu, P.-Y., Williams, L. M., Wang, C.-H., & Chu, S. N. G., J. Vac. Sci. Technol. A5, 3153, (1987).
8. Williams, L. M., Lu, P.-Y., Wang, C.-H., & Chu, S. N. G., Appl. Phys. Lett. to be published on Nov. 23, 1987.
9. Scott, M. W., J. Appl. Phys. 43, 1055 (1972).
10. Leopold, D. J., Wroge, M. L., and Broerman, J. G., Appl. Phys. Lett. 50, 924 (1987).

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