Skip to main content Accessibility help
×
Home

The Potential of High-Resolution Transmission Electron Microscopy for Imaging Impurities at Dislocations and Grain Boundaries in Silicon

  • Jamie H. Rose (a1) and R. Gronsky (a1)

Abstract

The application of HRTEM to the study of equilibrium segregation in linear and planar silicon defects is evaluated with image calculations. For this purpose, models for interstitial segregation in the Σ=9 grain boundary and donor segregation in the 30° partial dislocation are proposed. These models possess columns of impurity atoms.

Systematic image simulations were first examined for an impurity column in an otherwise perfect <110> silicon crystal. Optimum contrast and exposure times require samples of thickness equal to the transmitted beam extinction distance. Arsenic and boron are detectable with a column concentration of about 5%. With diffuse phase contrast imaging, this limit is roughly halved.

The above imaging conditions may be used to distinguish different defect core models.

Observation of segregated impurities requires somewhat higher concentrations in addition to image comparisons with a clean defect. Quantitative analysis necessitates careful image simulation comparisons and improvements in knowledge of microscope parameters.

Copyright

References

Hide All
(1) Hashimoto, H., Endoh, H., Takai, Y., Tomioka, H., and Yodota, Y., Chem. Scrip. 14, 23 (1978).
(2) Yamashita, T., Ponce, F. A., Pirouz, P., and Sinclair, R., Phil. Mag. A 45, 693 (1982).
(3) Zakharov, N. D., Pasemann, M., and Rozhanski, V. N., Phys. Stat. Sol. 71, 275 (1982).
(4) Endoh, Hisamitsu, Hashimoto, Hatsujiro, and Takai, Yoshizo, Trans. Jpn. Inst. Met. 24, 307 (1983).
(5) Glaisher, R. W. and Spargo, A. E. C., Inst. Phys. Conf. Ser. No. 68, 185 (1983).
(6) Bursill, L. A. and Jun, Shen Guang, Optik, 66, 251 (1984).
(7) Oueldennaoua, A., Michel, J. P., and George, A., Inst. Phys Conf. Ser. No. 67, 33 (1983).
(8) d'Anterroches, C. and Bourret, A., Phil. Mag., 49, 783 (1984).
(9) Olsen, A. and Spence, J. C. H., Phil. Mag., 43, 945 (1981).
(10) Hirth, John Price and Lothe, Jens, Theory of Dislocations, 2nd ed. (John Wiley and Sons, New York, 1982), p. 376.
(11) Mandurah, M. M., Saraswat, K. C., Helms, C. R., and Kamins, T. I., J. Appl. Phys. 51, 5755 (1980).
(12) Mott, N. F., Phil. Mag. 19, 835 (1969).
(13) Rose, Jamie H., Ph.D. Thesis, University of California-Berkeley, 1985.
(14) O'Keefe, M. A. and Buseck, P. R., Trans. A. C. A. 15, 27 (1979).
(15) Cowley, J. M., Diffraction Physics, (North-Holland, Amsterdam,, 1975).
(16) Spence, J. C. H., in Electron Microscopy and Analysis, edited by Venables, J. A. (Academic Press, New York, 1975).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed