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Post-Processing of Pulsed Laser-Deposited Pzt Thin Films

  • C. K. Chiang (a1), W. Wong-Ng (a1), L. P. Cook (a1), P. K. Schenck (a1), H. M. Lee (a2), P. S. Brody (a3), K. W. Bennett (a3) and B. J. Rod (a3)...

Abstract

PZT thin films were prepared by pulsed laser deposition on unheated Ptcoated Si substrates. As deposited, the films were amorphous. Films crystallized at 550 - 600 °C to produce predominantly crystalline ferroelectric PZT. Crystallization of the amorphous material was accompanied by a linear shrinkage of ∼2 %, as manifested in development of cracks in the film. Spacing, width and morphology of larger cracks followed a regular progression with decreasing film thickness. For film thicknesses less than 500 runm, much of the shrinkage was taken up by small, closely-spaced cracks of local extent. Implications for measurement of PZT thin film ferroelectric properties and processing are discussed.

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1. Schenck, P. K., Cook, L. P., Zhao, J., Farabaugh, E. N., and Chiang, C. K., Proc. Symposium on Beam Solid Interaction: Physical Phenomena, Mat. Res. Soc., 157A, 587, (1990)
2. Brody, P.S., Rod, B.S., Benedetto, J.M., Bennett, K.W., Cook, L.P., Schenck, P.K., Chiang, C.K. and Wong-Ng, W., Proc. Seventh Intl Symp. on Applic. of Ferroelectrics, Univ. III, Urbana-Champaign, IL., (1990).
3. Cook, L. P., Vaudin, M. D., Schenck, P. K., Wong-Ng, W., Chiang, C. K., and Brody, P. S., p. 241246 in Thompson, C. V., Tsao, J. Y., and Srolovitz, D. J., eds., “Evolution of Thin-Film and Surface Microstructure”, Mater. Res. Soc. Symp. Proc., 202, (1991).
4. Chiang, C.K., Cook, L.P., Schenck, P.K., “Ferroelectric Thin Films”, Mat. Res. Soc., 200, 133, (1990).
5. McMillan, P. W., “Glass-Ceramics”, London, Academic Press, p. 110, (1979).

Post-Processing of Pulsed Laser-Deposited Pzt Thin Films

  • C. K. Chiang (a1), W. Wong-Ng (a1), L. P. Cook (a1), P. K. Schenck (a1), H. M. Lee (a2), P. S. Brody (a3), K. W. Bennett (a3) and B. J. Rod (a3)...

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