Skip to main content Accessibility help
×
Home

Porous Amorphous Si Formation by the Etching of Single Crystal Si Substrates

  • T. George (a1), R. P. Vasquez (a1), S. S. Kim (a1), R.W. Fathauer (a1) and W. T. Pike (a1)...

Abstract

The nature of light-emitting porous Si layers produced by non-anodic stain etching of p-type (100) Si substrates is studied. The layers were characterized by transmission electron microscopy as being amorphous in nature. X-ray photoelectron spectroscopy and electron spin resonance measurements show these layers to be composed mainly of a-Si. The formation mechanism of the a-Si is explored using by stain etching SiGe ‘marker’ layers within epitaxially grown Si films and by high temperature annealing. These experiments provide strong evidence for a spontaneous crystalline-amorphous phase transformation during the etching process.

Copyright

References

Hide All
1. Canham, L.T., Appl. Phys. Lett. 57, 1046 (1990).
2. Fathauer, R. W., George, T., Ksendzov, A., Lin, T.-L., Pike, W. T. and Vasquez, R. P., Appl. Phys. Lett. 60, 995 (1992).
3. Archer, R.J., J. Phys. Chem. Solids 14, 104 (1960).
4. Cullis, A. G. and Canham, L. T., Nature 353, 335 (1991).
5. Vasquez, R. P., Fathauer, R. W., George, T., Ksendzov, A. and Lin, T. L., Appl. Phys. Lett. 60, 1004 (1992).
6. Pickering, C., Beale, M. I. J., Robbins, D. J., Pearson, P. J. and Greef, R., Thin Solid Films 125, 157 (1985).
7. Pickering, C., Beale, M. I. J., Robbins, D. J., Pearson, P. J. and Greef, R., J. Phys. C. 17, 6535 (1984).
8. George, T., Anderson, M. S., Pike, W. T., Lin, T. L., Fathauer, R. W., Jung, K. H. and Kwong, D. L., Appl. Phys. Lett. 60, 2359 (1992).
9. Vasquez, R. P., Madhukar, A. and Tanquay, A. R. Jr, J. Appl. Phys. 58, 2337 (1985) and references therein.
10. Thomas, P. A., Brodsky, M. H., Kaplan, D. and Lepine, D., Phys. Rev. B 18, 3059 (1978).
11. Dersch, H., Stuke, J. and Beichler, J., Phys. Stat. Sol. (b) 105, 265 (1981).
12. Hong, C. S. and Hwang, H. L., Appl. Phys. Lett. 49, 645 (1986).
13. Veprek, S., Iqbal, Z. and Sarott, F.-A., Phil. Mag. B 45, 137 (1982).
14. Gaffet, E. and Harmelin, M., J. Lessc. Met. 157, 201 (1990).
15. Gaffet, E., Faudot, F. and Harmelin, M., Mat. Sci. and Engg. A. 149, 85 (1991).
16. Drosd, R. M., Ph. D. Thesis, U. C. Berkeley, Nov. 1979 and references therein.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed