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Plasticity Length Scale in LIGA Nickel MEMS Structures

Published online by Cambridge University Press:  15 March 2011

J. Lou ,
P. Shrotriya ,
S. Allameh ,
N. Yao ,
T. Buchheit  and
W.O. Soboyejo
J. Lou
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, Olden Street, Princeton, NJ 08544
P. Shrotriya
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, Olden Street, Princeton, NJ 08544
S. Allameh
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, Olden Street, Princeton, NJ 08544
N. Yao
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, Olden Street, Princeton, NJ 08544
T. Buchheit
Affiliation:
Mechanical Reliability and Modeling Dept., Sandia National Laboratories, Albuquerque, NM 87185
W.O. Soboyejo
Affiliation:
The Princeton Materials Institute and The Department of Mechanical and Aerospace Engineering, Princeton University, Olden Street, Princeton, NJ 08544
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Abstract

The plasticity length scale parameters associated with rotational and stretch gradients in LIGA nickel MEMS structures plated from sulfamate bath are presented in this paper. These are obtained from micro-bend and micro-tensile experiments on LIGA nickel films with different thicknesses. The composite length-scale parameter, lc is measured to be ∼ 4.8 νm for as-plated films (25, 50, 100 and 175 νm thick). The implications of the results are then discussed for the modeling of plasticity in LIGA nickel structures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 687: Symposium B – Materials Science of Microelectromechanical Systems (MEMS) Devices IV , 2001 , B2.5
Copyright
Copyright © Materials Research Society 2002

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References

1. Madou, M., “Fundamental of Microfabrication”, 1999, CRC Press, Boca Raton, FL. Google Scholar
2. Christensen, T., Buchheit, T., Schmale, D.T. and Bourcier, R.J., in Microelectromechanical Structures for Materials Research, S. Brown et al., Editors, Materials Research Society, “Mechanical and Metallographic Characterization of Nickel and 80%Ni-20%Fe Permalloy”, 1999, pp. 185–191.Google Scholar
3. Last, H., Hemker, K.J. and Witt, R. MEMS, in Materials Science of Microelectromechanical Systems (MEMS) Devices II, Boer, de et al. , Editors, Materials Research Society, “Material Microstructure and Elastic Property Modeling”, 2000, pp. 191–196.Google Scholar
4. Xie, Z.L., Pan, D., Last, H., and Hemker, K.J., in Materials Science of Microelectromechanical Systems (MEMS) Devices II, Boer, de et al. , Editors, Materials Research Society, “Effect of As-Processed and Annealed Microstructures on the Mechanical Properties of LIGA Ni MEMS”, 2000, pp. 197–202 Google Scholar
5. Ashby, M.F., “The deformation of plastically non-homogenous alloys”, Philos. Mag. 21, 1970, pp. 399–424 Google Scholar
6. Ma, Q. and Clarke, D. R., Size dependent hardness of silver single crystals. J. Mater. Res. 10, 1995, pp. 853–863 Google Scholar
7. Poole, W.J., Ashby, M. F. and Fleck, N. A., “Micro-hardness of annealed and work-hardened copper polycrystals”, Scripta Materialia 34(4), 1996, pp. 559–564 Google Scholar
8. Begley, M.R. and Hutchinson, J. W., “The mechanics of size-dependent indentation”, J. Mech. Phys. Solids 46, 1998, pp. 2049–2068 Google Scholar
9. Stölken, J.S. and Evans, A. G., “A micro-bend test method for measuring the plasticity length scale”, Acta Mater. 46, 1998, pp. 5109–5115 Google Scholar
10. Fleck, N.A. and Hutchinson, J.W., “A Phenomenological theory for strain gradient effects in plasticity”, J. Mech. Phys. Solids 41, 1994, pp. 1825–1857 Google Scholar