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Plasma Synthesis of Rare Earth Doped Integrated Optical Waveguides

  • S. Raoux (a1) (a2), S. Anders (a1), K. M. Yu (a1), I. C. Ivanov (a3) and I. G. Brown (a1)...

Abstract

We describe a novel means for the production of optically active planar waveguides. The technique makes use of a low energy plasma deposition. Cathodic-arc-produced metal plasmas are used for the metallic components of the films and gases are added to form compound films. Here we discuss the synthesis of A12-xErxO3 thin films. The erbium concentration (x) can vary from 0 to 100% and the thickness of the film can be from Angstroms to microns. In such material, at high active center concentration (x=l% to 20%), erbium ions give rise to room temperature 1.53μm emission which has minimum loss in silica-based optical fibers. With this technique, multilayer integrated planar waveguide structures can be grown, such as Al2O3/Al2-xErO3/A12O3/Si, for example.

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1. Integrated optics: devices and applications, edited by Boyd, J.T.. (IEEE, New York, NY, 1990)
2. Optoelectronic Integrated Circuit Materials, Physics and Devices. Razeghi, M., Witt, G. L., SPIE Proc., vol 2397, Photonics west, San Jose, Feb. 410, (1995).
3. Federighi, M., Massarek, I., Trwoga, P. F., Electr. lett., Vol.30 No 11, 1277–82, (1994).
4. Oguma, M., Kitagawa, T., Hattori, K., M. Horiguchi. IEEE Phot. Tech. Lett., Vol 6, No 5, 1041 (1994).
5. Lumholt, O., Rasmussen, T., Bjarklev, A.. Electr. Lett. Vol 29, No 5, 495, (1993).
6. Hattori, K., Kitagawa, T., Oguma, M., Ohmori, Y., Horigushi, M.. Electr. Lett. Vol 30, No 11, 856 (1994)10.1049/el:19940596
7. Van den Hoven, G. N., Snoeks, E., Polman, A., van Uffelen, J. W. M., Oei, Y. S., Smit, M. K., Apll. Phys. Lett. 62, 24, 3065, (1993).
8. Lallier, E., Pocholle, J. P., Papuchon, M., He, Q., De Micheli, M., Ostrowsky, D. B., Grezes-Breset, C., Pelletier, E., Electr. Lett., Vol 28, No 15,1428, (1992).
9. Lui, M., MacFarlane, R. A., Yap, D. and Lederman, D., Electr. Lett. 29, 2, 172, (1993).10.1049/el:19930116
10. Marcuse, D., Theory of dielectric optical waveguides, Acad. Press, (1974)
11. Emmons, R. M., KLtrdi, B. N., Hall, D. G., IEEE J. Quant. Elect. 28, 1, (1992).
12. Barrière, A.S., Raoux, S., Garcia, A., L'Haridon, H., Moutonnet, D. and Lambert, B., J. Appl. Phys. 75, 2, 1133, (1994).10.1063/1.356497
13. Rare Earth doped semiconductors. edited by Pomrenke, G. S., Klein, P. B. and Langer, D. W.. (Mater. Res. Soc. Proc., Vol.301, 1993).
14. Godechot, X., Salmeron, M. B., Ogletree, D. F., Galvin, J. E., Galvin, R. A., MacGill, R. A., Dickinson, M. R., Yu, K. M. and Brown, I. G., Mat. Res. Soc. Symp. Proc. Vol.190, 95, (1991).
15. Anders, A., Anders, S., Brown, I. G., Dickinson, M. R. and Macgill, R. A., J. Vac. Sci. Technol. B, 12, 2, 815, (1994).
16. Anders, S., Anders, A., Rubin, M., Wang, Z., Raoux, S., Kong, F. and Brown, I. G., ICMCTF-95, San Diego, April 2428, (1995).
17. Brown, I. G., Dickinson, M. R., Galvin, J. E., Godechot, X. and MacGill, R. A., Nucl. Inst. Meth. Phys. Res. B, 55, 506, (1991).
18. Aksenov, I. I., Belous, V. A., Padalka, V. G., Khoroshikh, V. M., Sov. J. Plasma Phys. 4, 425, (1978).
19. Anders, A., Anders, S., and Brown, I. G., J. Appl. Phys. 75, 10, 4900, (1994).
20. Anders, S., Anders, A., and Brown, I. G., J. Appl. Phys. 75, 10, 4895, (1994)
21. Pasquale, F. Di, Zoboli, M., Federighi, M., Massareck, I., IEEE J. Quant. El. 30, 5, 1277, (1994).
22. Lupei, A., Lupei, V., Georgescu, S., Ursu, I., Zhekov, V. I., Murina, T. M., Prokhorov, A. M., Phys. Rev. B. 41, 16, (1990).

Plasma Synthesis of Rare Earth Doped Integrated Optical Waveguides

  • S. Raoux (a1) (a2), S. Anders (a1), K. M. Yu (a1), I. C. Ivanov (a3) and I. G. Brown (a1)...

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