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Plasma Immersion Ion Implantation Modification of Surface Properties of Polymer Material

Published online by Cambridge University Press:  03 September 2012

Imad F. Husein ,
Yuanzhong Zhou ,
Shu Qin ,
Chung Chan ,
Jacob I. Kleiman  and
Krassimir Marchev
Imad F. Husein
Affiliation:
Plasma Science and Microelectronics Research Laboratory, Department of Electrical and Computer Engineering, Northeastern University, Boston, MA, 02115
Yuanzhong Zhou
Affiliation:
Plasma Science and Microelectronics Research Laboratory, Department of Electrical and Computer Engineering, Northeastern University, Boston, MA, 02115
Shu Qin
Affiliation:
Plasma Science and Microelectronics Research Laboratory, Department of Electrical and Computer Engineering, Northeastern University, Boston, MA, 02115
Chung Chan
Affiliation:
Plasma Science and Microelectronics Research Laboratory, Department of Electrical and Computer Engineering, Northeastern University, Boston, MA, 02115
Jacob I. Kleiman
Affiliation:
Integrity Testing Laboratory and Institute for Aerospace Studies, University of Toronto, Ontario M3H5T6, Canada
Krassimir Marchev
Affiliation:
Barnett Institute, Northeastern University, Boston, MA, 02115
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Abstract

The use of plasma immersion ion implantation (PIII) as a novel method for the treatment of polymer surfaces is investigated. The effect of PIII treatment on the coefficient of friction, contact angle modification, and surface energy of silicone and EPDM (ethylene-propylene-diene monomer) rubber are investigated as a function of pulse voltage, treatment time, and gas species. Low energy (0 - 8 keV) and high dose (∼1017 - 1018 ions/cm2) implantation of N2, Ar, and CF4 is performed using an inductively coupled plasma source (ICP) at low pressure (0.2 mTorr). PIII treatment reduces the coefficient of friction (μ) of silicone rubber from μ = 0.464 to the range μ = 0.176 – 0.274, and μ of EPDM rubber decreases from 0.9 to the range μ = 0.27 – 0.416 depending on processing conditions. The contact angle of water and diiodomethylene decreases after implantation and increases at higher doses for both silicone and EPDM rubber.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 511
Copyright
Copyright © Materials Research Society 1997

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