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Piezopolymer Diaphragm as high performance biosensor platform

Published online by Cambridge University Press:  01 February 2011

Z.-Y. Cheng ,
Suiqiong Li ,
Zhuo Xu  and
Z.-Y. Cheng
Z.-Y. Cheng
Affiliation:
chengzh@eng.auburn.edu, Auburn University, Materials Research and Education Center, 201 Ross Hall, Auburn, AL, 36849-5341, United States, 334-844-4913, 334-844-3400
Suiqiong Li
Affiliation:
lisuiqi@auburn.edu, Auburn University, Materials Research and Education Center
Zhuo Xu
Affiliation:
xuzhuo@mail.xjtu.edu.cn, Xian Jiaotong University, EMRL, China, People's Republic of
Z.-Y. Cheng
Affiliation:
chengzh@eng.auburn.edu, Auburn University, Materials Research and Education Center, United States
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Abstract

Piezopolymer PVDF and P(VDF-TrFE) based diaphragms were fabricated. The diaphragm can be used as a high performance sensor platform for employing in liquid. The microelectronic process for fabricating microdiaphragm and its array is established. The performance of the PVDF based diaphragm in air and liquid was tested. It is found that the diaphragm works well in liquid.

Keywords

sensorpiezoelectricpolymer
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 889: Symposium W – Electroresponsive Polymers and Their Applications , 2005 , 0889-W01-09
Copyright
Copyright © Materials Research Society 2006

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