Skip to main content Accessibility help

Photoluminescence Characterization of Thin Silicon-On-Insulator Films Produced by Oxygen Implantation

  • J. Weber (a1), H. Baumgart (a2), J. Petruzzello (a2) and G.K. Celler (a3)


Single crystal silicon films on top of a buried SiO2 layer were produced by implanting 1.7x10180+ions/cm2 at 150keV into (100) Czochralski silicon, followed by annealing at higher temperatures. The defect properties of the layers are studied after each processing step by low temperature photoluminescence measurements and transmission electron micrography (TEM). Dislocation-related photoluminescence signals correlate with their TEM observations in the same samples. The photoluminescence method proves to be a very versatile and convenient method for characterizing the quality of silicon-on-insulat or structures.



Hide All
1 Izumi, K., Doken, M., Ariyoshi, H., Electron Lett. 14, 593 (1978)
2 Celler, G.K., Solid State Technology 30 (3), 93 (1987)
3 Tajima, M. and Nomura, M., Jpn. J.Appl.Phys. 20, L697 (1981)
4 Duncan, W.M., Chang, P.-H., Mao, B.-Y., and Chen, C.-E., Appl .Phys.Lett. 51, 773 (1987)
5 Celler, G.K., CRC Critical Reviews in Solid State and Mat.Sci., 12, 193 (1984)
6 Minaev, N.S. and Mudryi, A.V., phys.stat.sol. (a) 68, 561 (1981)
7 Dornen, A., Sauer, R. and Weber, J., in Proceedings of the 13th International Conference on Defects in Semiconductors edited by Kimerling, L.C. and Parsey, J.H. Jr. (The Metallurgical Soc. of AIME, N.Y., 1985), p.653.
8 Sauer, R., Weber, J., Stolz, J., Weber, E.R., Küsters, K.-H. and Alexander, H., Appl.Phys. A 36, 1 (1985)
9 Drozdov, N.A., Patrin, A.A., Tkachev, V.D., Sov.Phys.JETP Lett. 23, 597 (1976)
10 Drozdov, N.A., Patrin, A.A., and Tkachev, V.D., phys.stat.sol.(a) 64, K63 (1981)
11 van Ommen, A.H., Koek, B.H., and Viegers, M.P.A., Appl. Phys. Lett. 49, 628 (1986)
12 Olego, D.J., Baumgart, H. and Cellen, G.K., to be published in Appl.Phys.Lett.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed