Skip to main content Accessibility help
×
Home

Photo and Thermal Stability of Chlorine Doped Amorphous Silicon TFTs

  • J. H. Kim (a1), J. H. Choi (a1), C. W. Kim (a1) and J. H. Souk (a1)

Abstract

The Cl doped amorphous silicon film was deposited from SiH4, SiH2C12 and H2 gas mixture by PECVD process and their properties with various SiH2C12 flow rate is discussed. Controlling the amount of Cl doped was crucial for acquiring high stability TFT without lowering on current. Amorphous silicon and Cl doped amorphous silicon double layer TFT structure, with satisfactory on current and throughput, proved to be more stable than conventional amorphous silicon TFT in photo state and in elevated temperatures.

Copyright

References

Hide All
1. Hirabashi, I., Morigaki, K. and Nitta, S., Jpn. J. Appl. Phys. 19 (1980) L387
2. Dersch, H., Stuke, J. and Beichler, J., Appl. Phys. Lett. 38 (1980) 456
3. Yang, L. H., Fong, C. Y. and Nichols, C. S., Mat. Res. Soc. Symp. 118 (1988) 513
4. Hanazawa, Y., Inada, K., Dohjo, M., Hirota, S. and Higuchi, T., Asia Displays '95, 103
5. Byun, J. S., Jeon, H. B., Lee, K. H. and Jang, J., Appl. Phys. Lett. 67 (1995) 3786
6. Osbome, I. S., Hata, N. and Matsuda, A., Appl. Phys. Lett. 66 (1995) 965
7. Private conversation with J. Jang
8. Osbome, I. S., Hata, N. and Matsuda, A., Jpn. J. Appl. Phys. 34 (1995) L159
9. Powell, M. J., Appl. Phys. Lett. 43 (1983) 597
10. Powell, M. J., van Berkel, C., French, I. D. and Nicholls, D. H., Appl. Phys. Lett. 51 (1987) 965
11. Jackson, W. B., Marshall, J. M. and Moyer, M. D., Phys. Rev. B, 39 (1989) 1164
12. Nickel, N., Fuhs, W. and Mell, H., Phil. Mag. B, 61 (1990) 251

Photo and Thermal Stability of Chlorine Doped Amorphous Silicon TFTs

  • J. H. Kim (a1), J. H. Choi (a1), C. W. Kim (a1) and J. H. Souk (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed