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Phosphorus Glass Doping of Polycrystalline Silicon During Rapid Thermal Annealing

  • Bouchaib Hartiti (a1), Abdelilah Slaoui (a1), Roland Stuck (a1), Jean-Claude Muller (a1) and Paul Siffert (a1)...

Abstract

We show that the use of phosphorus doped spin-on glasses as diffusion source is an attractive approach for the formation of shallow junctions in polycrystalline silicon materials. Moreover, this very simple doping process using a glass film can be fruitfully associated to rapid thermal annealing.

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Phosphorus Glass Doping of Polycrystalline Silicon During Rapid Thermal Annealing

  • Bouchaib Hartiti (a1), Abdelilah Slaoui (a1), Roland Stuck (a1), Jean-Claude Muller (a1) and Paul Siffert (a1)...

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