Skip to main content Accessibility help
×
×
Home

The Phase Transition of Bi-Pt Alloys at the Interface of Pt/SrBi2Ta2O9 and its Effect on Interface Roughness

  • Dong Suk Shin (a1) (a2), Ho Nyung Lee (a1), Yong Tae Kim (a3), Young K. Park (a1) and In-Hoon Choi (a2)...

Abstract

Pt/SrBi2Ta2O9(SBT)/CeO2/Si (MFIS) structures were investigated for observing the change of electrical properties and morphology of interface of Pt/SBT after post-annealing of Pt top electrodes. The morphology of Pt/SBT interface became smooth and Bi oxide was formed at the bottom of Pt top electrode after post-annealing Pt top electrode. In order to describe the origin of these changes, Bi-oxide/Pt/SiO2/Si structure was investigated with annealing temperatures about the reaction between Bi oxide and Pt. We can describe that the smooth interface of Pt/SBT and the consumption of metallic Bi, which the reason why electrical properties were drastically improved, is induced by the melting of Pt-Bi alloys and formation of Bi-oxide after post-annealing Pt top electrode.

Copyright

References

Hide All
1. Aroujo, C. A. Paz de, Cuchiaro, J. D., McMillan, L. M., Scott, M. C. and Scott, J. F., Science 347, 627 (1995).
2. Watanabe, H., Mihara, T., Yoshimori, H., and Aroujo, C. A. Paz de, Jpn. J. Appl. Phys. 34, 5240 (1995).
3. Noguchi, T., Hase, T. and Miyasaka, Y., Jpn. J. Appl. Phys. 35, 4900 (1996).
4. Shin, D. S., Lee, H. N., Lee, C. W., Kim, Y. T. and Choi, I. H., Jpn. J. Appl. Phys. 37, 5189 (1998).
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed