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The Phase Transition of Bi-Pt Alloys at the Interface of Pt/SrBi2Ta2O9 and its Effect on Interface Roughness

  • Dong Suk Shin (a1) (a2), Ho Nyung Lee (a1), Yong Tae Kim (a3), Young K. Park (a1) and In-Hoon Choi (a2)...


Pt/SrBi2Ta2O9(SBT)/CeO2/Si (MFIS) structures were investigated for observing the change of electrical properties and morphology of interface of Pt/SBT after post-annealing of Pt top electrodes. The morphology of Pt/SBT interface became smooth and Bi oxide was formed at the bottom of Pt top electrode after post-annealing Pt top electrode. In order to describe the origin of these changes, Bi-oxide/Pt/SiO2/Si structure was investigated with annealing temperatures about the reaction between Bi oxide and Pt. We can describe that the smooth interface of Pt/SBT and the consumption of metallic Bi, which the reason why electrical properties were drastically improved, is induced by the melting of Pt-Bi alloys and formation of Bi-oxide after post-annealing Pt top electrode.



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MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
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