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Phase Transformation of Smooth Diamond Films Grown by hot Filament Chemical Vapor Deposition on Positively Biased Silicon Substrates.

  • G. Popovici (a1), C. H. Chao (a2), M. A. Prelas (a1), E. J. Charlson (a2) and J. M. Meese (a2)...

Abstract

Smooth diamond films have been grown by hot filament chemical vapor deposition under d.c. bias on mirror-polished Si substrates. Films a few micrometers thick were obtained in 30 minutes. Raman spectra showed very broad diamond peaks. X-ray diffraction showed the presence of diamond and also other carbon phase with a line 2.11 Å. With time, the films apparently underwent a phase transformation.

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1. Wild, C., Muller-Sebert, W., Eckermann, T., and Koidl, P., Applications of Diamond Films and Related Materials, Materials Sci. Monographs, vol. 73, (Elsevier Sci. Publishers, 1991) p. 197
2. Ownby, P. D., Yang, X., and Liu, J., J. Amer. Ceram. Soc. 75, 1876 (1992)
3. Badzian, A. R. and Badzian, T., Diamond and Related Materials, 2, 147 (1993)
4. Barrett, C. and Massalski, T. B., Structure of Metals, Pergamon Press, N. Y. 1980, pp. 486507

Phase Transformation of Smooth Diamond Films Grown by hot Filament Chemical Vapor Deposition on Positively Biased Silicon Substrates.

  • G. Popovici (a1), C. H. Chao (a2), M. A. Prelas (a1), E. J. Charlson (a2) and J. M. Meese (a2)...

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