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Performance and Reliability of Ultrathin Oxynitride Gate Dielectrics Prepared using In-Situ Multiple Rapid Thermal Processing

  • G. Q. Lo (a1), D. K. Shih (a1), W. Ting (a1) and D. L. Kwong (a1)

Abstract

The electrical characteristics of ultrathin oxynitride gate dielectrics prepared by in-situ multiple rapid thermal processing in reactive ambients (O2 and NH3) have been studied. Specifically, the conduction mechanism, charge trapping properties, time-dependent breakdown, and interface hardness in oxynitride films have been characterized as a function of both RTO and RTN processing parameters. In addition, N-channel MOSFET's have been fabricated using oxynitrides as gate dielectrics and their hot carier immunity has been examined and compared with devices with pure thermal oxides. Devices with superior electrical characteristics and reliability have been produced by optimizing RTO/RTN parameters.

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1 Ito, T., Nakamura, T., and Ishikawa, H., J. Electrochem. Soc., 129, 2102 1982.
2 Tsai, H. H., Wu, L. C., and Hu, C., IEEE Elec. Dev. Lett., EDL–8, 143(1987).
3 Terry, F. L., Jr., Aucoin, R. J., Naiman, M. L., and Senturia, S. D., IEEE Elec. Dev. Lett., EDL.4,191 (1983).
4 Hori, T. and Iwasaki, H., IEDM Tech, Dig., 570 (1987).
5 Shih, D. K., Chang, W. T., Lee, S. K., Ku, Y. H., Kwong, D. L. and Lee, S., Appl. Phys. Lett., 52(20), 1698(1988).
6 Shih, D. K., Kwong, D. L. and Lee, S., Appl. Phys. Lett., 54(9), 822(1989).
7 Kusaka, T., Hiraiwa, A., and Mukai, K., J. Electrochem. Soc., 135, 166 1988.

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Performance and Reliability of Ultrathin Oxynitride Gate Dielectrics Prepared using In-Situ Multiple Rapid Thermal Processing

  • G. Q. Lo (a1), D. K. Shih (a1), W. Ting (a1) and D. L. Kwong (a1)

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