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Penetration of Tagged Organics into Caulked and Un-caulked Porous Dielectrics Measured by Rutherford Backscattering
Published online by Cambridge University Press: 01 February 2011
Abstract
A novel method for studying the penetration of wet chemicals into caulked and uncaulked porous dielectrics was developed, and the barrier properties of parylene X were evaluated. Rutherford backscattering spectrometry (RBS) was used to study the penetration of chlorine-tagged organics, 3-chloro-1-propanol and a %5 HCl solution. After one minute of exposure time, eight times more 3-chloro-1-propanol diffused through uncaulked porous dielectric compared to caulked porous dielectric. Penetration from the side of the samples was found to be insignificant.
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- Copyright © Materials Research Society 2007