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Passivation and Annealing for Improved Stability of High Performance IGZO TFTs

  • T. Mudgal (a1), N. Walsh (a1), R.G. Manley (a2) and K.D. Hirschman (a1)


The influence of annealing ambient conditions and deposited passivation materials on indium-gallium-zinc-oxide (IGZO) thin-film transistor (TFT) performance is investigated. Results from annealing experiments confirm that a nominal exposure to oxidizing ambient conditions is required, which is a function of temperature, time and gas environment. Nitrogen anneal with a controlled air ramp-down provided the best performance devices with a mobility (µsat) of 11-13 cm2/V·s and subthreshold slope (SS) of 135-200 mV/dec, with some hysteresis. Plasma-deposited passivation materials including sputtered quartz and PECVD SiO2 demonstrated a significant increase in material conductivity, which was not significantly reversible by an oxidizing ambient anneal. E-beam evaporated Al2O3 passivated devices that were annealed in air at 400 °C demonstrated improved stability over time and suppressed hysteresis in comparison to unpassivated devices. Devices which were passivated with B-staged bisbenzocyclobutene-based (BCB) resins and annealed in air at 250 °C also exhibited suppressed hysteresis.



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1. Hayashi, R., Ofuji, M., Kaji, N., Takahashi, K., Abe, K., Yabuta, H., Sano, M., Kumomi, H., Nomura, K., Kamiya, T., Hirano, M. and Hosono, H., J. Soc. Inf. Disp., 15, 915 (2007).
2. Kamiya, T., Nomura, K. and Hosono, H., J. Disp. Technol., 5, 273 (2009).
3. Nomura, K., Kamiya, T., Hirano, M. and Hosono, H., Appl. Phys. Lett., 95, 013502 (2009).
4. Hoshino, K., Bao, Y. and Wager, J., J. Soc. Inf. Disp., 21, 310 (2013).
5. Ryu, S. O., Journal of Nanoelectronics and Optoelectronics, 6, 283 (2011).
6. Mudgal, T., Walsh, N., Manley, R. G. and Hirschman, K. D., ECS Journal of Solid State Science and Technology, 3, Q3032 (2014).
7. Park, J.-S., Jeong, J. K., Mo, Y.-G., Kim, H. D. and Kim, S.-I., Applied Physics Letters, 90, 262106 (2007).



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