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Parylene Copolymers

  • Kelly J. Taylor (a1), Mona Eissa (a1), Justin F. Gaynor (a1), Shin-Puu Jeng (a1) and Hoan Nguyen (a1)...

Abstract

Improvements in the properties of Parylene may enable their use in high performance integrated circuits. Parylenes are a class of polymers formed by chemical vapor deposition which nearly meet the high standards of the low-k triumvirate, namely, 1) adhesion, particularly to SiO2, 2) thermal stability above 400 Celsius, and 3) permittivity less than 2.7. Parylene-N has been incorporated into both aluminum-1 and copper-2 based metallization schemes, however, improvements in the adhesion and thermal stability are still needed to simplify and increase the robustness of the integration schemes. Additionally, a reduction in the permittivity would be beneficial from both device performance and extendibility points-of-view. We have synthesized various Parylene-N-based copolymers with improved adhesion, thermal stability, and permittivity. We discovered that a copolymer of tetravinyl-tetramethyl-cyclotetrasiloxane and Parylene-N has a permittivity of close to 2.1 and both the adhesion to SiQ2 and thermal stability are measurably improved compared to the homopolymer.

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1. Jeng, S.-P., Chang, M.-C., Kroger, T., McAnally, P., Havemann, R., in 1994 Svmp.on VLSI Technology Digest of Technical Papers, (IEEE, Piscataway., NJ, 1994), p. 73.
2. Gutmann, R. J., Chow, T. P., Duquette, D. J., Lu, T.-M., McDonald, J. F., Murarka, S. P., in Low Dielectric Constant Materials-Synthesis And Applications in Microelectronics, edited by Lu, T.-M., Murarka, S. P., Kuan, T.-S., Ting, C. H. (Mater. Res. Soc. Proc. 381, Pittsburgh, PA 1995), p. 177.
3. Beach, W.F., Lee, C., Bassett, D. R., Austin, T. M. and Olson, R. in Encyclopedia of Polymer Science and Engineering, Vol. 17, (John Wiley & Sons,, 1989), p. 9901025.
4. Gaynor, J. F. and Desu, S. B., J. Mater. Res 9, p. 3125 (1994).
5. Sochilin, V. A., …., Kardash, I. Ye., Doclady Akademii Nauk SSSR. 319, p. 173 (1991).
6. Gaynor, J. F., Senkevich, J. J. and Desu, S. B., J. Mater. Res. 11, p. 1842 (1996).
7. Schumacher, J. C., Inc., 1969 Palomar Oaks Way, Carlsbad, California 92009.
8. Also, IH, IH, 1 lH-Eicosafluoroundecyl Methacrylate, Monomer-Polymer &Dajac Labs, Inc., 1675 Bustleton Pike, Feaseterville, PA 19053.
9. Monomer-Polymer & Dajac Labs, Inc. (see above).
10. Also, 2,4,6,8-tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane, from 1) PCR, Inc., 4404 NE 53rd RD, Gainesville, FL 32609, or 2) Aldrich Chemical Company, 1001 West Saint Paul Ave., Milwaukee, WI53233.
11. SciVision, 128 Spring St., Lexington, MA 02173.

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