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The Origin Of The 0.78 eV Luminescence Band In Strained Layer SiGe/Si

  • Anthony J. Kenyon (a1), Edward A. Steinman (a2), Christopher W. Pitt (a1), David E. Hole (a3) and Vladimir I. Vdovin (a4)...

Abstract

The photoluminescence band around 0.78 eV that is sometimes seen in strained layer SiGe samples or deformed silicon containing a high density of dislocations has been attributed to the presence of oxygen complexes. In this study we have prepared a set of Si0.9Ge0.1 samples by MBE which have then been implanted with iron, erbium, or oxygen in order to study the effect of implanted impurities on photoluminescence in the technologically important region around 1.5 microns.

Following implantation with oxygen, two luminescence bands appear around 0.85 eV and 0.78 eV, respectively. However, these bands are not present in either the unimplanted sample or those subject to Er or Fe implantation. The correlation between oxygen doping and the appearance of these bands supports the conjecture that they are associated with oxygen complexes.

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The Origin Of The 0.78 eV Luminescence Band In Strained Layer SiGe/Si

  • Anthony J. Kenyon (a1), Edward A. Steinman (a2), Christopher W. Pitt (a1), David E. Hole (a3) and Vladimir I. Vdovin (a4)...

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