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Optimization of RF-Sputtered ITO Films for High NIR Transparency at Low Deposition Temperature

  • J. Zhou (a1), X. Wu (a1), T.A. Gessert (a1), Y. Yan (a1), G. Teeter (a1) and H.R. Moutinho (a1)...

Abstract

Sn-doped indium oxide (ITO) films deposited at temperatures <250°C by r.f. magnetron sputtering are investigated for use as transparent back-contact electrodes to CdS/CdTe top cells in two-junction, mechanically stacked tandem-cell designs. Results show that carrier mobility increases with substrate temperature while beneficial changes in carrier activation occurs at a substrate temperature ~230°C. Small additions of oxygen to the sputtering environment are effective at reducing near infrared (NIR) absorption. Control of these deposition parameters has produced ITO films with NIR absorption (860–1300 nm) < 10%, and electrical resistivity of <1x10-3 ohm-cm.

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1 Wu, X., Mulligan, W.P., and Coutts, T.J., Thin Solid Films, 286, 274276, (1996).
2 Gorjanc, T.C., Leong, D., Py, C., and Roth, D., Thin Solid Films, 413, 181185, (2002).
3 Wu, X., Zhou, J., Duda, A., Keane, J.C., Gessert, T.A., Yan, Y., and Noufi, R., Prog. in Photovoltaic: Research and Appl., 2005, in press.
4 Thornton, J.A., Ann. Rev. Mater. Sci., 7, 239260, 1977.
5 Choi, J.B., Kim, J.H., Jeon, K.A., and Lee, S.Y., Mat. Sci. Engi., B102, 376379, (2003).
6 Yoshida, Y., Wood, D.M., Gessert, T.A., Coutts, T.J., Appl. Phys. Lett 84 (12) 20972099 (2004).
7 Pla, J., Tamasi, M., Rizzoli, R., Losurdo, M., Centurioni, E., Summonte, C., and Rubinelli, F., Thin Solid Films, 425, 185192, (2003).
8 Coutts, T.J., Gessert, T.A., Dhere, R.G., Nelson, A.J., and Aharoni, H., Rev. Brasil. Apl. Vac., 6, 289317, (1986).
9 Akkad, F.E., Marafi, M., Punnoose, A., and Prabu, G., Phys. Stat. Sol., (a), 177, 445452, (2000).
10 Henrich, V.E. and Cox, P.A., The Surface Science of Metal Oxides (Cambridge University Press, Cambridge, U.K. 1994).

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