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Optimization of PZT-based MEMS

Published online by Cambridge University Press:  01 February 2011

Firas Akasheh ,
Todd Myers ,
Susmita Bose  and
Amit Bandyopadhyay
Firas Akasheh
Affiliation:
School of Mechanical and Materials Engineering Washington State University, Pullman WA 99164-2920, U.S.A
Todd Myers
Affiliation:
School of Mechanical and Materials Engineering Washington State University, Pullman WA 99164-2920, U.S.A
Susmita Bose
Affiliation:
School of Mechanical and Materials Engineering Washington State University, Pullman WA 99164-2920, U.S.A
Amit Bandyopadhyay
Affiliation:
School of Mechanical and Materials Engineering Washington State University, Pullman WA 99164-2920, U.S.A
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Abstract

Due to their excellent piezoelectric properties, PZT ceramics are attractive materials for many MEMS applications. By depositing a PZT film on a micro-machined platinized silicon substrate, membranes can be actuated in the flexural mode. In this work, 2D arrays of PZT actuated membranes, which can be used as ultrasonic transducers, have been designed, fabricated, and tested for their ferroelectric response. The device behavior was also modeled using FEA. Data from FEA runs were used to evaluate the device performance based on its effective coupling coefficient (efficiency), acoustic impedance, and resonance frequency. Results show that the device-coupling factor is significantly affected by the PZT and silicon layers' thickness and the top electrode configuration. Results also indicate a considerable flexibility in optimizing the device performance under a wide range of operational requirements, which makes such devices attractive for different applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 729: Symposium U – MEMS and BioMEMS , 2002 , U2.4
Copyright
Copyright © Materials Research Society 2002

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References

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