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Optimization of Aluminum Nitride Thermal Conduchvity VIA Controlled Powder Processing

Published online by Cambridge University Press:  25 February 2011

Theresa A. Guiton ,
James E. Volmering  and
Kris K. Killinger
Theresa A. Guiton
Affiliation:
Dow Chemical, Advanced Ceramics Laboratory, 1776 Building, Midland, MI 48674
James E. Volmering
Affiliation:
Dow Chemical, Advanced Ceramics Laboratory, 1776 Building, Midland, MI 48674
Kris K. Killinger
Affiliation:
Dow Chemical, Advanced Ceramics Laboratory, 1776 Building, Midland, MI 48674
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Abstract

The emergence of aluminum nitride ceramics in electronic and structural applications has been largely due to the increased availability of high quality powders. Much of the process development has been concentrated in capturing markets within the electronics industry, mainly high thermal conductivity substrates. The thermal conductivity of A1N substrates is strongly dependent on oxygen chemistry and sintering parameters. A key source of oxygen is AlN powder impurities. In this study, powders with differing oxygen contents were formulated with various Y2O3 levels. The results indicate that the distribution of sintered oxygen is strongly correlated with the relative concentration of the powder's lattice and surface oxygen. Under the sintering parameters of the analysis, optimal thermal conductivities were achieved when Y4Al2O9 was present as the grain boundary phase. As predicted, the powders with the lowest lattice oxygen concentrations exhibited the highest thermal conductivities. Hence, depending upon the surface oxygen content, different yttria levels were required for optimal thermal conductivities, i.e., higher surface oxygen contents required higher sintering additive levels than did low surface oxygen powders.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 271: Symposium N – Better Ceramics Through Chemistry V , 1992 , 851
Copyright
Copyright © Materials Research Society 1992

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