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Optical Indices of Hydride of Mg-Ca Alloy Thin Films Evaluated by Spectroscopic Ellipsometry

  • Y. Yamada (a1), K. Tajima (a1), M. Okada (a1), M. Tazawa (a1), A. Roos (a2) and K. Yoshimura (a1)...

Abstract

Mg1-z Ca z (0.03 < z < 0.17) alloy thin films covered with thin Pd are hydrogenated using 4% H2 in Ar under atmospheric pressure at room temperature. The optical indices, which are refractive indices and extinction coefficients, in the wavelength between 250 and 1700 nm of these hydrides were evaluated with spectroscopic ellipsometry. The evaluated refractive indices were about 2.0 for all hydrides, while the extinction coefficients showed the values less than 0.06 in the visible range for hydride with Ca composition of z ≤ 0.08 and the coefficients increased sharply to more than 0.3 with Ca composition z > 0.08.

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1. Yamada, Y., Bao, S., Tajima, K., Okada, M., Yoshimura, K., Appl. Phys. Lett. 94, 191910 (2009).
2. Yoshimura, K., Yamada, Y. and Okada, M., Appl. Phys. Lett. 81, 47094711 (2002).
3. Bao, S., Tajima, K., Yamada, Y., Okada, M., and Yoshimura, K., Appl. Phys. A 87, 621624 (2007).

Keywords

Optical Indices of Hydride of Mg-Ca Alloy Thin Films Evaluated by Spectroscopic Ellipsometry

  • Y. Yamada (a1), K. Tajima (a1), M. Okada (a1), M. Tazawa (a1), A. Roos (a2) and K. Yoshimura (a1)...

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