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On the thermal re-oxidation of silicon oxynitride

Published online by Cambridge University Press:  01 February 2011

Arturo Morales-Acevedo  and
G. Francisco Pérez-Sánchez
Arturo Morales-Acevedo
Affiliation:
Centro de Investigación y de Estudios Avanzados del IPN, Electrical Engineering Department, Av. IPN No. 2508, 07360 México, D. F. e-mail: amorales@gasparin.solar.cinvestav.mx
G. Francisco Pérez-Sánchez
Affiliation:
Centro de Investigación y de Estudios Avanzados del IPN, Electrical Engineering Department, Av. IPN No. 2508, 07360 México, D. F. e-mail: amorales@gasparin.solar.cinvestav.mx
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Abstract

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 786: Symposium E – Fundamentals of Novel Oxide/Semiconductor Interfaces , 2003 , E3.17
Copyright
Copyright © Materials Research Society 2004

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References

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