Skip to main content Accessibility help
×
Home

On factors affecting the extraction of elastic modulus by nanoindentation of organic polymer films

  • F. Iacopi (a1), M. Laknin (a2), A. Mulloy (a3), J.M.J. den Toonder (a4), D. Vanhaeren (a1) and S. H. Brongersma (a1)...

Abstract

A detailed study of nanoindentation in Continuous Stiffness Mode (CSM) on a family of aromatic thermosetting polymers is carried out to identify the causes for the large variability in the extracted values of the elastic modulus of organic polymer films.

It is shown that the variation of parameters determining the dynamics of the force application such as the CSM frequency, the actual strain or load rate, and the duration of the waiting time segments can lead up to 20% difference in the estimated elastic modulus. The reason for this is related to creep, more specifically to viscoelastic behaviour, typical of organic films. On the other hand, pile-up is shown to have a negligible effect on the extraction of the elastic modulus from indentation depths below 50% of the film thickness, even for films with hardness as low as 0.13GPa. It is also concluded that neither pile-up nor creep phenomena can account for the overestimation of the elastic modulus with nanoindentation as compared to the values extracted with the surface acoustic waves technique.

Copyright

References

Hide All
1. Tsui, T., Pharr, G.M., J. Mater.Res. 14 (1), 1999
2. Brongersma, S.H., 3rd European Symposium on nano-mechanical testing, 2003 Hueckelhoven, Germany.
3. Abell, T., Iacopi, F., Prokopowicz, G., Sun, B., Mazurenko, A., Travaly, Y., Baklanov, M., Sullivan, C., Brongersma, S., Liou, H-C., Tower, J., Gostein, M., Gallagher, M., Calvert, J., Moinpour, M., Maex, K., proc. of Advanced Metallization Conference 2004, S. Diego, Ca., USA.
4. Shen, L., Zeng, K., Microelectron.Eng. 71, pp.221228, 2004.
5. Mills, N.J., Plastics: Microstructure, properties and applications, E. Arnold Publishers, London, 1986.
6. Briscoe, B.J., Fiori, L., Pelillo, E., J Phys D: Appl. Phys 31, pp 23952405, 1998.
7. Martin, S.J., Godschalx, J.P., Mills, M.E., Shaffer, E.O., Townsend, P.H., Advanced Materials 12 (23), pp.17691778, 2000.
8. Maex, K., Baklanov, M.R., Shamiryan, D., Iacopi, F., Brongersma, S., Yanovitskaya, Z.S., J. Appl.Phys. 93 (11), pp.87938841, 2003.
9. Dow Chemical public communications, http://www.dow.com/silk/silky
10. Lucas, B.N., Oliver, W.C., Swinderman, J.E., MRS Fall Meeting, Fundamentals of Nanoindentation and Nanotribology Symp., San Francisco, CA, USA, 1317 April 1998
11. Neubrand, A., Hess, P., J. Appl.Phys. 71 (1), pp.227238, 1992.
12. Iacopi, F., Brongersma, S.H., Mulloy, A., den Toonder, J.M.J., Maex, K., submitted to Applied Physics Letters, nov.2004.
13. Deriano, S., Jarry, A., Rouxel, T., Sangleboeuf, J.-C., Hampshire, S., J.of Non-Crystalline Solids 344 (1–2), pp.4450, 2004.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed