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Observation of Large, Anomalous Pyroelectric Response in AlN Thin Films

  • Everett Crisman (a1), Vladimir Vasilyev (a2), Alvin Drehman (a2) and Richard Webster (a2)

Abstract

We have observed a pyroelectric effect (PE) in reactively sputtered aluminum nitride (AlN) thin films that is typically a factor of twenty greater than commercial pyroelectric materials such as triglycine sulfate (TGS). This is most likely due to an extrinsic effect since the known crystalline structures of AlN are too symmetric to allow such high values for the PE response. Preliminary annealing studies support the assumption that residual strains remaining from the AlN thin film deposition are the most likely source of the anomalously high PE response. The results of these studies are presented along with some measurements that indicate a still higher PE response might be obtainable.

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1. Bykhovski, D., Kaminski, V.V., Shur, M.S., Chen, Q.C., and Khan, M.A., Appl. Phys. Lett. 69, 3254 (1996).
2. Fuflygin, V., Salley, E., Osinsky, A., and Norris, P., Appl. Phys. Lett. 77, 3075 (2000).
3. Fraden, J., AIP Handbook of Modern Sensors, (AIP Press, New York, 1993) p. 96.
4. Crisman, E.E., Derov, J.S., Drehman, A.J., and Gregory, O.J., J. Electrochem. Soc., Solid-State Lett. 8(3) A141L1 (2005).
5. NIST, Powder Diffraction Standards File No.25-1133.
6. The modeling program used for this project was E-Z Thermal available from GK Solutions, 1606 Slate Run Circle NE, Canton, OH 44721, (330) 499-3410.
7. Shur, M.S., Bykhovski, A. D. and Gaska, R., presented at the Materials Research Society fall meeting, November (1998).
8. Janssen, G. C. A. M., Abdalla, M. M., van Keulen, F. Pujada, B. R. and van Venrooy, B., Thin Solid Films 517(6) 2009
9. Petersen, K.E., Silicon as a mechanical material, Proc. IEEE., Vol. 70, No. 5, 1982
11. Handbook of Electronic Materials, Vol 2, III-V Semiconductor Compounds, edited by Neuberger, M. (Plenum Press, New York, 1971) p.4.
12. Aita, C.R. and Gawlak, C.J., J. Vac. Sci. Technol., A 1(2), 403 (1983).

Keywords

Observation of Large, Anomalous Pyroelectric Response in AlN Thin Films

  • Everett Crisman (a1), Vladimir Vasilyev (a2), Alvin Drehman (a2) and Richard Webster (a2)

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