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Observation of Domain Switching in Fatigued Epitaxial Pb(Zr,Ti)O3 Thin Films

Published online by Cambridge University Press:  26 February 2011

Yong Kwan Kim
Affiliation:
ykkim@iem.titech.ac.jp, Tokyo Institute of Technology, Department of Innovative and Engineered Materials, 4259 Nagatsuta-cho, Midori-ku,, Yokohama, 226 8502, Japan, +81-45-924-5446, +81-45-924-5446
Shintaro Yokoyama
Affiliation:
yokoyama@iem.titech.ac.jp, Tokyo Institute of Technology, Department of Innovative and Engineered Materials, Japan
Risako Ueno
Affiliation:
ueno@iem.titech.ac.jp, Tokyo Institute of Technology, Department of Innovative and Engineered Materials, Japan
Hitoshi Morioka
Affiliation:
h_morioka@k6.dion.ne.jp, Tokyo Institute of Technology, Department of Innovative and Engineered Materials, Japan
Osami Sakata
Affiliation:
o-sakata@spring8.or.jp, Japan Synchrotron Radiation Research Institute/ SPring-8, Research & Utilization Division, Japan
Shigeru Kimura
Affiliation:
kimuras@sp8sun.spring8.or.jp, Japan Synchrotron Radiation Research Institute/ SPring-8, Research & Utilization Division, Japan
Keisuke Saito
Affiliation:
keisuke.saito@bruker-axs.jp, Bruker AXS, Application Laboratory, Jordan
Hiroshi Funakubo
Affiliation:
funakubo@iem.titech.ac.jp, Tokyo Institute of Technology, Department of Innovative and Engineered Materials, Japan
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Abstract

We performed x-ray diffraction measurements by using highly brilliant synchrotron radiation on epitaxial Pb(Zr0.35Ti0.65)O3 film capacitor structures. Small regions of 300-nm-thick epitaxial Pb(Zr,Ti)O3 thin films with Pt and SrRuO3 top electrodes were measured after applying various numbers of switching cycles of the electric field. Epitaxial Pb(Zr,Ti)O3 thin films were prepared on epitaxial (100)cSrRuO3/(100)SrTiO3 substrates by pulsed-metalorganic chemical vapor deposition. The volume faction of c-domain and remanent polarization was plotted against the number of switching cycles. In the both capacitors, the Vc increased as the switching cycle increased independent of fatigue behavior.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

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