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Numerical Simulation of Laser Induced Substrate Heating for Direct Write of Mesoscopic Integrated Conformal Electronics (MICE)

  • S. Lowry (a1), J. C. Sheu (a2), Robert Stewart (a3) and Robert Parkhill (a3)

Abstract

A numerical tool is developed to simulate the optical and thermal interactions of selected lasers with precursors and substrates in support of the emerging technology for the direct write of Mesoscopic Integrated Conformal Electronics (MICE). The code couples the Discrete Ordinate Method (DOM) radiation model with the multi-physics computation fluid dynamics code CFD-ACE to predict the conductive and radiative heat transport in the process

This paper provides a brief overview of the numerical model. Selected simulations are presented including comparison with empirical data. The capabilities, limitations, and potential applications of the model with respect to MICE are discussed. Future model enhancements are proposed

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1) Giridharan, M.G., Lowry, S.A., and Krishnan, A., “A Multi-Block BFC Radiation Model for Complex Geometries,” 30th AIAA Thermophysics Conference, San Diego, CA, 19-22 June, 1995.
2) Kannapel, M., Lowry, S.A., Krishnan, A., Clark, I., Hyer, P., and Johnson, E., “Preliminary Study of the Influence of Grashof and Reynolds Numbers on the Flow and Heat Transfer in an MOCVD Reactor,” CFDRC No. PA-97-01, SPIE International Symposium, San Diego, CA, July 27 - Aug.1, 1997.
3) Kodas, Toivo et al. , J. Appl. Phys. 61 (8), pp. 27492753, April 1987.

Numerical Simulation of Laser Induced Substrate Heating for Direct Write of Mesoscopic Integrated Conformal Electronics (MICE)

  • S. Lowry (a1), J. C. Sheu (a2), Robert Stewart (a3) and Robert Parkhill (a3)

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