Skip to main content Accessibility help
×
Home

Nucleation and Growth of μc-Si:H n- and p-Type Layers in a-Si:H p-i-n AND n-i-p Solar Cells: Real Time Spectroellpsometry Studies

  • Joohyun Koh (a1), H. Fujiwara (a1), C. R. Wronskii (a2) and R. W. Collins (a3)

Abstract

We have applied real time spectroellipsometry (RTSE) to study the growth of microcrystalline silicon n- and p-layers [μc-Si:H:(P,B)] incorporated into amorphous silicon (a-Si:H) p-i-n and n-i-p solar cells, respectively. In previous research, we have applied RTSE to characterize a-Si:H solar cells having only amorphous component layers. The μc-Si:H(P,B) component layers, however, pose a more difficult RTSE analysis problem for two reasons. First, the near-surface of the underlying i-layer is modified in the μc-Si:H:(P,B) growth process, and second, the microstructural evolution near the i/(n,p) interfaces is very complicated. From RTSE spectra (1.5 < hv < 4 eV) collected every ∼4–15 s during growth, we have extracted the time evolution of the μc-Si:H:(P,B) layer microstructure, thicknesses, and optical properties along with the modifications that the near-surface i-layer properties undergo in the formation of the i/(n,p) interfaces. We suggest that the beneficial optical properties of the microcrystalline layers may be due to size effects in the crystallites that make up the films.

Copyright

References

Hide All
1. Collins, R.W., Koh, J., Lu, Y., Kim, S., Burnham, J.S., and Wronski, C.R., Proceedings of the 25th IEEE Photovoltaics Specialists Conference, May 1996, Washington DC, USA, (IEEE, 1996), p. 1035.
2. Koh, J., Lu, Y., Kim, S., Burnham, J.S., Wronski, C.R., and Collins, R.W., Appl. Phys. Lett. 67, 2669 (1995).
3. Guha, S., Yang, J., Nath, P., and Hack, M., Appl. Phys. Lett. 49, 218 (1986).
4. An, I., Li, Y.M., Wronski, C.R., and Collins, R.W., Phys. Rev. B 48, 4464 (1993).
5. Cody, G.D., Brooks, B.G., and Abeles, B., Solar Energy Mater. 8, 231 (1982).
6. Bras, L., J. Phys. Chem. 90, 2555 (1986).
7. Wang, L.-W. and Zunger, A., J. Phys. Chem. 98, 2158 (1994), and references therein.
8. Lautenschlager, P., Garriga, M., Vina, L., and Cardona, M., Phys. Rev. B 36, 4821 (1987).

Nucleation and Growth of μc-Si:H n- and p-Type Layers in a-Si:H p-i-n AND n-i-p Solar Cells: Real Time Spectroellpsometry Studies

  • Joohyun Koh (a1), H. Fujiwara (a1), C. R. Wronskii (a2) and R. W. Collins (a3)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed