Skip to main content Accessibility help

We use cookies to distinguish you from other users and to provide you with a better experience on our websites. Close this message to accept cookies or find out how to manage your cookie settings.

Close cookie message
×
Home
  • Home
Article
  • Cited by 6

  • Get access
    Add to cart £25.00
    Check if you have access via personal or institutional login
    Log in Register

Nucleation and Growth in Vicinity of Growing Surface in Making Microcrystalline Silicon

  • Masami Nakata (a1), Tatsuru Namikawa (a1), Hajime Shirai (a1), Jun-ichi Hanna (a1) and Isamu Shimizu (a1)...

Abstract

A close study was conducted on microcrystalline Silicon (μc-Si) prepared by PE-CVD (Plasma Enhanced CVD) from SiF4 with the assistance of atomic hydrogen. The atomic hydrogen played a major role in either making precursors, SiFnHm (n+m=3), by gas phase reactions with the fragments, SiFn (≤3), or constructing Si-network in the vicinity of the growing surface. Proper conditions of nucleation were markedly different from those of growth with respect to parameters, flow of atomic hydrogen and substrate temperature.

Copyright

COPYRIGHT: © Materials Research Society 1990

References

Hide All
Veprek, S., Iqbal, Z. and Sarott, F.A.:Phil.Mag.,B45(1982)137
2. Matsuda, A., J.Non-Cryst. Solids,59/60 (1983)767
3. Tsai, C.C.,Anderson, G.B.,Thompson, R.,and Wecker, B.,J.Non-Cryst. Solids, 114 (1989) 118
4. Shibata, N.,Fukuda, K.,Ohtoshi, H.,Hanna, J.,Oda, S. and Shimizu, I.,Jpn.J.Appl. Phys.,26(1987)L10
5. Shibata, N.,Oda, S.,and Shimizu, I.,Jpn.J.Appl.Phys.,26(1987)L276
6. Nishida, S.,Shiimoto, T.,Yamada, A.,Karasawa, S.,Konagai, M.,and Takahashi, K., Appl.Phys.Lett.,49(1986)79
7. Tanabe, H.,Azuma, M.,Uematsu, T.,Shirai, H.,Hanna, J. and Shimiz, I., Mat.Res. Soc. Symp. Prod 149(1989) 17
8. Shibata, N.,Fukuda, K.,Ohtoshi, H.,Hanna, J.,Oda, S.,and Shimizu, I., Mat. Res. Soc. Symp. Proc.,95(1987)225
9. Veprek, S.,Sarott, F.A.,and Iqbal, Z.,Phys.Rev. B36(1987)3344
10. Shimizu, I.,Hanna, J., and Shirai, H.,MRS Symp Proc.(Boston,1989) in press
  • Cited by 6

  • Get access
    Add to cart £25.00
    Check if you have access via personal or institutional login
    Log in Register

Nucleation and Growth in Vicinity of Growing Surface in Making Microcrystalline Silicon

  • Masami Nakata (a1), Tatsuru Namikawa (a1), Hajime Shirai (a1), Jun-ichi Hanna (a1) and Isamu Shimizu (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed