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A Novel Range of Noble Metal Organometallic Fluorides for use in the Fabrication of Submicron Metal Features by E-Beam or UV Irradiation

  • J. Thomson (a1), A. H. Fzea (a1), J. Lobban (a1), P. McGivern (a1), J. A. Cairns (a2), A. G. Fitzgerald (a2), G. J. Berry (a2), M. R. Davidson (a2) and Y. C. Fan (a2)...

Summary

The preparation a nd characterisationo f a novel organoplatinum fluoride is described. The physical vapour deposition (PVD) of the material was performed in the temperature range 160–170°C, and electron beam bombardment or uv irradiation, results in the degradation of the compound to give high quality metal features down to dimensions of ca 60 nm.

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* Correspondence author, e-mail j.z.thomson@dundee.ac. uk

References

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1 Technical News Release, C-98048, Dallas, 26/8/98
2 Cairns, J.A. and Thomson, J. Eur. Pat. 0, 670, 055 (1997)
3 ‘Production of an X-Ray Photomask’, Cairns, J.A., Thomson, J., Fitzgerald, A.G., Berry, G.J., Rodley, D. and Davidson, M., Intemational Conference in Micro and Nanoengineering, Athens, Greece, Sept., 1997
4 ‘1 nm X-Ray Lithography Using Novel Mask Fabrication Technique’, Berry, G.J., Cairns, J.A., Davidson, M.R., Rodley, D.R.G., Thomson, J., Turcu, I.C.E. and Shaikh, W., Rev. Sci Instrum Vol.69, No. 9, p 33503352, (1998)
5 ‘New Material for the Production of Fine Line Interconnects in Integrated Circuit Technology’, Berry, G.J., Caims, J.A. and Thomson, J.; J.Materials Science Letters,14, (1995), 844
6 ‘The Production of Fine Metal Tracks from a range of Organometallic Compounds’, Berry, G.J., Cairns, J.A. and Thomson, J., Sensors and Actuators A51, 4750, (1995)

A Novel Range of Noble Metal Organometallic Fluorides for use in the Fabrication of Submicron Metal Features by E-Beam or UV Irradiation

  • J. Thomson (a1), A. H. Fzea (a1), J. Lobban (a1), P. McGivern (a1), J. A. Cairns (a2), A. G. Fitzgerald (a2), G. J. Berry (a2), M. R. Davidson (a2) and Y. C. Fan (a2)...

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