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A Novel Organic Low-k Film Deposited by Plasma-Enhanced Co-Polymerization

  • Nobutaka Kunimi (a1), Jun Kawahara (a1) (a2), Keizo Kinoshita (a1) (a2), Akinori Nakano (a1), Masashi Komatsu (a1) and Takamaro Kikkawa (a3) (a4)...

Abstract

A new organic precursor was designed and synthesized in order to form polymer films having low dielectric constants by a plasma-enhanced co-polymerization (PCP) technology. The organic monomer features a large aliphatic hydrocarbon structure, tricyclodecane (TCD) group. Optimized polymer films deposited from the monomer had dielectric constants less than 2.5. A solid 13C-NMR spectrum showed that the TCD moiety in the precursor was included in the polymer without changing the structure. The effect of the deposition temperature on the film structure was studied by analyzing Raman spectra. It was revealed that the dielectric constant is strongly associated with sp2 carbon content in the TCD-based polymer films.

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1. Burkey, D. D. and Gleason, K. K., J. Vac. Sci. Technol. A 22(1), 61 (2004)
2. Fujii, N., Yamada, K., Oku, Y., Hata, N., Seino, Y., Negoro, C. and Kikkawa, T., Mat. Res. Soc. Symp. Proc. 812, 43 (2004)
3. Kikkawa, T., Ext. Abst. ADMETA 2003: Assian session, 1-2, 4 (2003)
4. Kawahara, J., Nakano, A., Kunimi, N., Kinoshita, K., Hayashi, Y., Ishikawa, A., Seino, Y., Ogata, T., Takahashi, H., Sonoda, Y., Yoshino, T., Goto, T., Takada, S., Ichikawa, R., Miyoshi, H., Matsuo, H., Adachi, S. and Kikkawa, T., Technical Dig. IEDM 2003, 6-2, 143 (2003)
5. Kinoshita, K., Proc. Plasma Science Symp. 2005 / 22nd Symp. Plasma Processing, 485, (2005)
6. Greene, T. W. and Wuts, P. G. M., Protective Groups in Organic Synthesis 3rd. Ed., John Wiley & Sons, Inc., 116 (1999)
7. Kinoshita, K., Nakano, A., Kunimi, N., Shimoyama, M., Kawahara, J., Miyoshi, H., Seino, Y., Takasu, Y., Ichikawa, R., Komatsu, M., Hayashi, Y. and Kikkawa, T., Proc. AMC 2004, P. 14, (2004)
8. Kim, J. Y., Hwang, M. S., Kim, Y.H., Kim, H. J. and Lee, Y, J. Appl. Phys. 90(5), 2469 (2001)

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A Novel Organic Low-k Film Deposited by Plasma-Enhanced Co-Polymerization

  • Nobutaka Kunimi (a1), Jun Kawahara (a1) (a2), Keizo Kinoshita (a1) (a2), Akinori Nakano (a1), Masashi Komatsu (a1) and Takamaro Kikkawa (a3) (a4)...

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