- Cited by 16
Nilsson, D Jensen, S and Menon, A 2003. Fabrication of silicon molds for polymer optics. Journal of Micromechanics and Microengineering, Vol. 13, Issue. 4, p. S57.
Nielsen, T. Nilsson, D. Bundgaard, F. Shi, P. Szabo, P. Geschke, O. and Kristensen, A. 2004. Nanoimprint lithography in the cyclic olefin copolymer, Topas[sup ®], a highly ultraviolet-transparent and chemically resistant thermoplast. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue. 4, p. 1770.
Nilsson, D. Nielsen, T. and Kristensen, A. 2004. Solid state microcavity dye lasers fabricated by nanoimprint lithography. Review of Scientific Instruments, Vol. 75, Issue. 11, p. 4481.
Haefliger, D. Nordström, M. Rasmussen, P.A. and Boisen, A. 2005. Dry release of all-polymer structures. Microelectronic Engineering, Vol. 78-79, Issue. , p. 88.
Nielsen, T. Pedersen, R.H. Hansen, O. Haatainen, T. Tolkki, A. Ahopelto, J. and Kristensen, A. 2005. Flexible stamp for nanoimprint lithography. p. 508.
Nilsson, Daniel Balslev, Søren and Kristensen, Anders 2005. A microfluidic dye laser fabricated by nanoimprint lithography in a highly transparent and chemically resistant cyclo-olefin copolymer (COC). Journal of Micromechanics and Microengineering, Vol. 15, Issue. 2, p. 296.
Zhuang, Yan Xin and Menon, Aric 2005. Wettability and thermal stability of fluorocarbon films deposited by deep reactive ion etching. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 23, Issue. 3, p. 434.
Zhuang, Y.X. and Menon, A. 2005. On the stiction of MEMS materials. Tribology Letters, Vol. 19, Issue. 2, p. 111.
Bilenberg, B. Hansen, M. Johansen, D. Özkapici, V. Jeppesen, C. Szabo, P. Obieta, I. M. Arroyo, O. Tegenfeldt, J. O. and Kristensen, A. 2005. Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue. 6, p. 2944.
Pedersen, R.H. Boltasseva, A. Johansen, D.M. Nielsen, T. Jørgensen, K.B. Leosson, K. Østergaard, J.E. and Kristensen, A. 2007. Nanoimprinted reflecting gratings for long-range surface plasmon polaritons. Microelectronic Engineering, Vol. 84, Issue. 5-8, p. 895.
Borel, Peter I. Bilenberg, Brian Frandsen, Lars H. Nielsen, Theodor Fage-Pedersen, Jacob Lavrinenko, Andrei V. Jensen, Jakob S. Sigmund, Ole and Kristensen, Anders 2007. Imprinted silicon-based nanophotonics. Optics Express, Vol. 15, Issue. 3, p. 1261.
Keller, Stephan Haefliger, Daniel and Boisen, Anja 2007. Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue. 6, p. 1903.
Epp, E. Ponnampalam, N. Newman, W. Drobot, B. McMullin, J. N. Meldrum, A. F. and DeCorby, R. G. 2010. Hollow Bragg waveguides fabricated by controlled buckling of Si/SiO_2 multilayers. Optics Express, Vol. 18, Issue. 24, p. 24917.
Melnyk, A. Potts, C. A. Allen, T. W. and DeCorby, R. G. 2016. Visible-range hollow waveguides by guided buckling of Ta_2O_5/SiO_2 multilayers. Applied Optics, Vol. 55, Issue. 13, p. 3645.
Chang, Long and Litvinov, Dmitri 2017. Nanoimprint lithography tone reversal process using poly(methyl methacrylate) and hydrogen silsesquioxane. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue. 4, p. 041603.
Nekrashevich, Ivan Chang, Long and Litvinov, Dmitri 2019. High-throughput nanomanufacturing of synthetic antiferromagnet-polymer nanoparticles with high magnetic moment, very low remanence, and high magnetic susceptibility for biomedical applications. Journal of Vacuum Science & Technology B, Vol. 37, Issue. 2, p. 022801.
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Fluorocarbon films are useful as antistiction films for suspended structure and also for electrical isolation purposes. Furthermore, due to their low dielectric constant and ease of deposition they are useful for VLSI manufacturing applications. Thus, in the interest of building a complete database for these plasma generated fluorocarbon films, we report a designed experiment with a 4-variable matrix to fully characterize deposited films using C4F8 as the feed gas in a high density inductively coupled plasma tool. We also demonstrate the in-situ microfabrication of electrostatic actuators that exhibit the corresponding passivation film for electrical isolation. The utilization of these films as a masking material for MEMS applications and in triple nested mask arrangements is also demonstrated.
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