Skip to main content Accessibility help
×
Home

Novel Antimony Precursors for Low-Temperature CVD of Antimonide Thin Films

  • Michael A. Todd (a1), Gautam Bhandari (a1) and T. H. Baum (a1)

Abstract

Volatile antimony precursors were synthesized for the low temperature chemical vapor deposition (CVD) of antimony thin films. The molecules synthesized include tris (trifluoromethyl)stibine, Sb(CF3)3, Lewis base adducts of Sb(CF3)3, and antimony trihydride (stibine), SbH3. Isotopie substitution of stibine with deuterium leads to a more thermally stable, carbon-free antimony source. Similarly, deuterium substitution of trimethylsilylmethyl antimony dihydride leads to a stabilized liquid antimony precursor. The molecules were characterized using FTIR, NMR and DSC / TGA. Pure antimony films were deposited at temperatures below 300 °C with growth rates approaching 170 Å / min using a low pressure hot-wall CVD reactor. The films were characterized using XRD, EDS, SEM and AFM.

Copyright

References

Hide All
1. Yang, R.Q., Yang, B.H., Zhang, D., Lin, C.H., Murry, S.J., Wu, H., and Pei, S.S.. Appl. Phys. Lett. 71(17), p. 2409 (1997).
2. Bocci, C., Bosacchi, A., Franchi, S., Gennari, S., Magnanini, R. and Drigo, A.V.. Appl. Phys. Lett. 71(11), p. 1549 (1997).
3. Huang, K.T., Chiu, C.T., Cohen, R.M., and Stringfellow, G.B.. J. Appl. Phys. 75, 2857 (1997).
4. kim, J.D., Wu, D., Wojkowski, J., Piotrowski, J., Bigan, E. and Razeghi, M.. Appl. Phys. Lett. 68, p. 99(1996).
5. Yang, R.Q. and Pei, S.S.. J. Appl. Phys. 79, 8197 (1996).
6. Johnson, A.D.. 1996 Electronic Materials Conference, Session U: Antimonide Based Infrared Materials, Paper U4.
7. Rybaltowski, A., Xiao, Y., Wu, D., Lane, B., Yi, H., Feng, H., Diaz, J. and Razeghi, M.. Appl. Phys. Lett. 71(17), p. 2430 (1997).
8. Razeghi, M., Yi, H., and Litvinov, V.. (unpublished results).
9. Lin, C.H., Chang, P.C., Murray, S.J., Zhang, D., Yang, R.Q., and Pei, S.S.. 1996 Electronic Materials Conference, Session U: Antimonide Based Infrared Materials, Paper U2.
10. Rybaltowski, A., Xiao, Y., Wu, D., Lane, B., Yi, H., Feng, H., Diaz, J. and Razeghi, M.. Appl. Phys. Lett. 71(17), p. 2430 (1997).
11. Yang, R.Q., Yang, B.H., Zhang, D., Lin, C.H., Murry, S.J., Wu, H., and Pei, S.S.. Appl. Phys. Lett. 71(17), p. 2409 (1997).
12. Lane, B., Wu, D., Rybaltowski, A., Yi, H., Diaz, J. and Razeghi, M., Appl. Phys. Lett. 70, p. 443 (1997).
13. Rybaltowski, A., Xiao, Y., Wu, D., Lane, B., Yi, H., Feng, H., Diaz, J. and Razeghi, M.. Appl. Phys. Lett. 71(17), p. 2430 (1997).
14. Dale, J.W., Emelius, H.J., Hazeldine, R.N. and Moss, J.H.. J. Am. Chem. Soc. 730, p. 3708 (1957).
15. Hendershot, D.G. and Berry, A.D.. J. Organomet. Chem. 119, p. 119 ( 1993).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed