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New progress on p-type macroporous silicon electrodissolution

Published online by Cambridge University Press:  01 February 2011

Paolo Bettotti ,
Zeno Gaburro ,
Luca Dal Negro  and
Lorenzo Pavesi
Paolo Bettotti
Affiliation:
INFM and Department of Physics, University of Trento Povo (TN), ITALY.
Zeno Gaburro
Affiliation:
INFM and Department of Physics, University of Trento Povo (TN), ITALY.
Luca Dal Negro
Affiliation:
INFM and Department of Physics, University of Trento Povo (TN), ITALY.
Lorenzo Pavesi
Affiliation:
INFM and Department of Physics, University of Trento Povo (TN), ITALY.
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Abstract

We discuss fabrication of macroporous structures, both random and periodical, on p-type silicon samples by electrochemical etching using aqueous and organic electrolytes. We have obtained different lattice structures starting from an unique lithographic mask. Organic compounds used in this work were Dimethylformamide (DMF) and Dimethylsulfoxide (DMSO).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 722: Symposia K/L – Materials and Devices for Optoelectronics and Photonics – Photonic Crystals-From Materials to Devices , 2002 , L6.7
Copyright
Copyright © Materials Research Society 2002

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References

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