Skip to main content Accessibility help

New Dynamic Air-Brush Technique for SWCNTs Deposition: Application to Fabrication of CNTFETs for Electronics and Gas Sensing

  • P. Bondavalli (a1), L. Gorintin (a1), P. Legagneux (a1), J.P. Simonato (a2) and L. Cailler (a2)...


This contribution deals with Carbon Nanotubes Field Effect transistors (CNTFETs) based gas sensors fabricated using a completely new dynamic spray based technique (patented) for SWCNTs deposition. The extreme novelty is that our technique is compatible with large surfaces, flexible substrates and allows to fabricate high performances transistors exploiting the percolation effect of the SWCNTs networks achieved with extremely reproducible characteristics. Recently, we have been able to achieve extremely selective measurement of NO2, NH3 and CO using four CNTFETS fabricated using different metals as electrodes, exploiting the specific interaction between gas and metal/SWCNT junctions. In this way we have identify an electronic fingerprinting of the gas detected. The response time is evaluated at less than 30sec.


Corresponding author


Hide All
1. Ijima, S., Nature 354, pp. 5658, 1991
2. Avouris, Ph., Chen, Z.and Perebeinos, V., Nature Nanotechnology 2, pp. 605615, (2007)
3. Collins, P.G., Hersam, M., Arnold, M., Martel, R. & Avouris, P., Phys. Rev. Lett. 86, pp. 31283131, (2001)
4. Kim, P., Shi, L.. Majumdar, A., McEuen, P. L., Phys.Rev.Lett. 87, p. 215502, (2001)
5. Fujii, M., Zhang, X., Xie, H., Ago, H., Takahashi, K., Ikuta, T., Abe, H., Shimizu, T., Appl. Phys. A A74, pp. 339343, (2002)
6. Hone, J., Llaguno, M. C., Biercuk, M. J., Johnson, A. T., Batlogg, B., Benes, Z., Fischer, J. E., Appl.Phys. A 74, no 3, pp. 339343, (2002)
7. Ruoff, R. S., Qian, D., Kam Liu, W., C. R. Physique 4, pp. 9931008, (2003)10.1016/j.crhy.2003.08.001
8. de Heer, W. A., Chatelain, A., and Urgate, D., Science 270, pp. 11791180, (1995)
9. Fan, S., Chapline, M. G., Franklin, N. R., Tombler, T. W., Cassell, A. M., and Dai, H., Science 283, pp. 512514 (1999)
10. Teo, K., JOM 59, pp. 2932, (2007)
11. Kim, Y. C. and Yoo, E. H., Jpn. J. Appl. Phys., 44, pp. L454L456, (2005)
12. Sugie, H., Tanemura, M., Filip, V., Iwata, K., Takahashi, K., and Okuyama, F., Appl. Phys. Lett, 78, pp. 25782580, (2001)
13. Prasher, R., Proceedings of the IEEE 94, pp. 15711586, (2006)
14. Qian, D., Wagner, G. J., Liu, W. K., Yu, M-F., Ruoff, R. S., Appl. Mech. Rev. 55, pp. 495532, (2002)
15. Appenzeller, J., Knoch, J., Martel, R., Derycke, V., Wind, S. J., IEEE transactions on nanotechnology 1, pp. 184189, (2002)
16. Dai, H., Surface Science 500, pp. 218241, (2002)
17. Sinha, N., Ma, J., Yeow, J. T. W., J.Nanoscience and Nanotechnology 6, pp. 573590, (2006)10.1166/jnn.2006.121
18. Chen, R. J., Choi, H. C., Bangsaruntip, S., Yenilmez, E., Tang, X., Wang, Q., Chang, Y-L., Dai, H., J. Am. Chem. Soc. 26, pp.15631568, (2004)
19. Chen, R.J., Bangsaruntip, S., Drouvalakis, K. A., Kam, N. W. S., Shim, M., Li, Y., Kim, W., Utz, P. J. and Dai, H., PNAS 100, pp.49844989, (2003)10.1073/pnas.0837064100
20. Koratkar, N., Ajayna, P., Modi, A., Lass, E., Patent WO/2004/059298
21. Goldoni, L. Petaccia, S. Lizzit, and Larciprete, R., J. Am. Chem. Soc., 125p 1132911333, (2003)
22. Ueda, T., Norimatsu, H., Bhuiyan, Md. M. H., Ikegami, T. and Ebihara, K., Jpn. J. Appl. Phys 45, pp. 83938397, (2006)
23. Li, J., Lu, Y., Ye, Q., Cinke, M., Han, J. and Meyyappan, M., Carbon Nanotube Sensors for Gas and Organic Vapor Detection, Nanoletters 3, 929933, (2003)10.1021/nl034220x
24. Valentini, L., Armetano, I., Kenny, J. H., Cantalini, C., Lozzi, L., Santucci, S., Appl.Phys.Lett. 82, pp. 961963, (2003)10.1063/1.1545166
25. Saito, R., Dresselhaus, G., Dressealhaus, M. S., Physical properties of carbon nanotubes, ed. Imperial college press, 259 (2003)
26. Kong, J., Franklin, N., Chou, C., Pan, S., Cho, K. J. and Dai, H., Science 287, pp. 622625, (2000).
27. Bondavalli, P., Legagneux, P., Pribat, D., Sensors and Actuators B V. 140, pp 304318, (2009)
28. Bondavalli, P., Legagneux, P., Pribat, D., Mat. Res. Society Proc. 1081, P1402, (2008)
29. Bondavalli, P., Legagneux, P., Pribat, D., Patent WO/2006/128828
30. CNTFETs based gas sensors: patent review, Bondavalli, P., Recent Patents on Electrical Engineering, 3 (2010)


New Dynamic Air-Brush Technique for SWCNTs Deposition: Application to Fabrication of CNTFETs for Electronics and Gas Sensing

  • P. Bondavalli (a1), L. Gorintin (a1), P. Legagneux (a1), J.P. Simonato (a2) and L. Cailler (a2)...


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed