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Near-Surface Optical Detection of CH3 During Diamond Growth

Published online by Cambridge University Press:  25 February 2011

E. J. Corat  and
D. G. Goodwin
E. J. Corat
Affiliation:
Division of Engineering and Applied Science, California Institute of Technology, Pasadena, CA 91125
D. G. Goodwin
Affiliation:
Division of Engineering and Applied Science, California Institute of Technology, Pasadena, CA 91125
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Abstract

Resonance-enhanced multiphoton ionization (REMPI) has been used to detect the methyl radical CH3 within 0.5 mm of the substrate during CVD diamond growth. A strong dependence of the CH3 REMPI signal near the surface on substrate temperature is observed, which is not seen further from the surface. Below 1000 K, the observed temperature dependence may be characterized by an activation energy of approximately 4 ± 1 kcal/mole. The cause of the methyl depletion at low temperatures is not yet clear, but may be due to either gas-phase recombination near the surface or surface chemistry. The same qualitative behavior is observed for different substrate-filament distances and for gas compositions from 0.5% to 5% CH4 in H2.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 377
Copyright
Copyright © Materials Research Society 1992

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References

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