Skip to main content Accessibility help
×
Home

Near-Edge X-ray Absorption Fine Structure of Hard Carbon Film Formed by Gas Cluster Ion Beam Assisted Deposition

  • Kazuhiro Kanda (a1), Yutaka Shimizugawa (a1), Yuichi Haruyama (a1), Isao Yamada (a1) (a2), Shinji Matsui (a1), Teruyuki Kitagawa (a3), Mititaka Terasawa (a3), Harushige Tsubakino (a3), Tatsuo Gejo (a4) and Masao Kamada (a4)...

Abstract

The coordination of the carbon atoms in the diamond-like carbon (DLC) films formed by Ar gas cluster ion beam (GCIB) assisted deposition of fullerene was investigated using synchrotron radiation. Near-edge x-ray absorption fine structure (NEXAFS) spectra of the carbon K-edge of the DLC films formed by various methods were measured over the excitation energy range 275-320 eV, using synchrotron radiation. On the basis of the analysis of the peak corresponding the transition of the excitation electron from carbon 1s orbital to Φ orbital, relative sp 2 contents of various DLC films were determined. The DLC films formed by Ar GCIB assisted fullerene deposition were found to consist of a high sp 3 hybridized carbon.

Copyright

References

Hide All
1. Ullmann, J., Nucl. Instr. and Meth. in Phys. Res. B127, 910 (1997).
2. Tsai, H. and Bogy, D.B., J. Vac. Sci. Technol. A5, 3287 (1987).
3. Yamada, I., Kitagawa, T., Matsuo, J. and Kirkpatrick, A., Mass. Char. Trans. Inorg. Materials 957 (2000).
4.A. HirayNakamura, a. E., Hasumoto, M., Kinoshita, T., Sakai, K., Ishiguro, E. and Watanabe, M., Rev. Sci. Instrum. 66, 2104 (1995).
5. Batson, P. E., Phys. Rev. B48, 2608 (1993).
6. Jaouen, M., Tourillon, G., Delafond, J., Junqua, N. and Hug, G., Diamond Relat. Mater. 4, 200 (1995).
7. Lenardi, C., Piseri, P., Briois, V., Bottani, C.E., Bassi, A. Li and Milani, P., J. Appl. Phys. 85, 7159 (1999).
8. Morar, J. F., Himpsel, F. J., Hollinger, G., Hughes, G. and Lordan, J. L., Phys. Rev. Lett. 54, 1960 (1985).
9. Berger, S. D., Kenzie, D. R. Mc and Martin, P. J., Philos. Mag. Lett. 57, 285 (1988).
10. Fallon, P. J., Veerasamy, V. S., Davis, C. A., Robertson, J., Amaratunga, G. A. J., Milne, W. J. and Koskinen, J., Phys. Rev. B48, 4777 (1993).

Related content

Powered by UNSILO

Near-Edge X-ray Absorption Fine Structure of Hard Carbon Film Formed by Gas Cluster Ion Beam Assisted Deposition

  • Kazuhiro Kanda (a1), Yutaka Shimizugawa (a1), Yuichi Haruyama (a1), Isao Yamada (a1) (a2), Shinji Matsui (a1), Teruyuki Kitagawa (a3), Mititaka Terasawa (a3), Harushige Tsubakino (a3), Tatsuo Gejo (a4) and Masao Kamada (a4)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.