Skip to main content Accessibility help

Near surface characteristics of highly sensitive metal oxide thin films

  • G. Kiriakidis (a1)


We present the gas sensing properties of InOx thin films deposited by dc sputtering and ZnOx thin films deposited both by dc sputtering and PLD. The sensitivity of the films towards ozone is correlated with the deposition parameters like film thickness, substrate deposition temperature and growth rate. Secondary Ion Mass Spectrometry (SIMS) analysis showed a noticeable deficit in oxygen in the top 5 nm for films in the “conducting” state, i.e., after UV exposure. Analysis of the sensing response for alumina-based transducers of InOx thin films revealed high sensitivity (less than 25 ppb) with fast and stable response towards ozone while ultimate sensitivity levels down to 10 ppb for ozone and 50 ppb for NO2 were achieved. Surface topography study of ZnOx films utilizing optical, AFM and SEM analyses has shown a distinct surface morphology variation correlated to the growth technique It is demonstrated that PLD leads to very rough surfaces with characteristic non-coordinated columnar features in contrast with the rather smooth surfaces obtained by sputtering.



Hide All
1. Granqvist, C. G., Appl. Phys. A 57, 19 (1993).
2. Meixner, H., Gerblinger, J., Lampe, U. and Fleisher, M., Sensors and Actuators B 23, 119 (1995).
3. Gagaoudakis, E., Bender, M., Douloufakis, E., Katsarakis, N., Natsakou, E, Cimalla, V. and Kiriakidis, G., Sensor and Actuators B 80, 155161 (2001).
4. Kiriakidis, G., Bender, M., Katsarakis, N., Gagaoudakis, E., Hourdakis, E., Douloufakis, E. and Cimalla, V., Phys. Stat. Sol. (a) 185, 2732 (2001).
5. Gurlo, A., Ivanovskaya, M., Barsan, N., Schweiser-Berberich, M., Weimar, U., Gopel, W. and Dieguez, A., Sensor and Actuators B 44, 327333 (1997).
6. Takada, T., Suzuki, K. and Nakane, M., Sensors and Actuators B 13, 404 (1993).
7. Vellekoop, M.J., Ultrasonic 36, 714 (1998).
8. Ippolito, S.J., Kandasamy, S., Kalantar-zadeh, K., Wlodarski, W., Galatsis, K., Kiriakidis, G., Katsarakis, N. and Katharakis, M., presented at the EUROSENSORS XVII, the 18-th European Conference on Solid-State Transducers, Rome, Italy, 12–15 September, 2004.
9. Xirouchaki, C., Kiriakidis, G., Pedersen, T. F. and Fritzsche, H., J. Appl. Phys. 79, 9349 (1996).
10. Muranaka, S., Bando, Y. and Takada, T., Thin Solid Films 151, 353 (1987).
11. Bender, M., Katsarakis, N., Gagaoudakis, E., Hourdakis, E., Douloufakis, E., Cimalla, V. and Kiriakidis, G.; J. Appl. Phys. 90, 5382 (2001).
12. Das, V.D., Kirupavathy, S., Damodare, L. and Lakshminarayan, N., J. Appl. Phys. 79, 8521 (1996).
13. Suchea, M. and Kiriakidis, G.. “Surface characterization of In and Zn oxides by Atomic Force Microscopy” Int. Semiconductor Conference {CAS 2004} Romania, Oct.4–6, 2004.
14. Kiriakidis, G., Katsarakis, N., Katharakis, M., Suchea, M., Galatsis, K., Wlodarski, W., Kotzias, D., CAS International Conference, Sinaia, Romania, October 4–6, 2004, invited paper.
15. Barsan, Nicolae and Weimar, Udo, Journal of Electroceramics 7, 143 (2001).
16. Katharakis, M., Christoulakis, S., Katsarakis, N., Koudoumas, M., Suchea, M., Savvakis, K., Efthimiopoulos, T., Kiriakidis, G., 20th Panhellenic Conference on Solid State Physics & Materials Science, Ioannina – Greece, September 26–29, 2004, (in Greek).

Near surface characteristics of highly sensitive metal oxide thin films

  • G. Kiriakidis (a1)


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed