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Nanostructural Evolution in Non-epitaxial Growth of Thin Films

  • Minghui Hu (a1), Suguru Noda (a2) and Hiroshi Komiyama (a3)

Abstract

The initial growth of non-epitaxial thin films was studied and discussed using the concept that thermodynamics controls the unit-structure within the surface diffusion length of deposits, whereas kinetics controls the ensemble-structure on a large scale. Three basic topics, growth mode (island shape), crystalline (island inner) structure, time-dependent properties of island ensemble (island size, distance, and density), are summarized based on the investigation of thin film growth of metals on TiO2, Cu on SiO2 and Ti/SiO2. This study provides fundamental understanding of structural control during thin film growth, and further can be applied to various advanced devices for electronics, photonics, catalysis, and energy applications.

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Nanostructural Evolution in Non-epitaxial Growth of Thin Films

  • Minghui Hu (a1), Suguru Noda (a2) and Hiroshi Komiyama (a3)

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