Skip to main content Accessibility help
×
Home

Nano-scale Chemistry of Complex Self-Assembled Nanostructures in Epitaxial SiGe Films

  • Prabhu Balasubramanian (a1), Jerrold A. Floro (a2), Jennifer L. Gray (a3) and Robert Hull (a1)

Abstract

Heteroepitaxy of SiGe alloys on Si (001) under certain growth conditions has previously been shown to cause self-assembly of nanostructures called Quantum Dot Molecules, QDMs, where pyramidal pits and 3D islands cooperatively form. QDMs have potential applications to nanologic device architectures such as Quantum Cellular Automata that relies on localization of charges inside islands to create bi-stable logic states. In order to determine the applicability of QDMs to such structures it is necessary to understand the nano-scale chemistry of QDMs because the chemistry affects local bandgap which in turn affects a QDM’s charge confinement property. We investigate the nanoscale chemistry of QDMs in the Si0.7Ge0.3/Si (100) system using Auger Electron Spectroscopy (AES). Our AES analysis indicates that compressively strained QDM pit bases are the most Ge rich regions in a QDM. The segregation of Ge to these locations cannot be explained by strain energy minimization.

Copyright

Corresponding author

a) Electronic Mail: balasg@rpi.edu

References

Hide All
1. Eaglesham, D. J. and Cerullo, M., Physical Review Letters 64 (16), 19431946 (1990).
2. Mo, Y. W., Savage, D. E., Swartzentruber, B. S. and Lagally, M. G., Physical Review Letters 65 (8), 10201023 (1990).
3. L. F. K. Hammar, M, Tersoff, J, Reuter, M C, Tromp, R M, Surface Science 349 (2) (1996).
4. Gray, J. L., Hull, R. and Floro, J. A., Applied Physics Letters 81 (13), 24452447 (2002).
5. Deng, X. and Krishnamurthy, M., Physical Review Letters 81 (7), 14731476 (1998).
6. Lent, C. S. and Tougaw, P. D., Proceedings of the Ieee 85 (4), 541557 (1997).
7. Amlani, I., Orlov, A. O., Toth, G., Bernstein, G. H., Lent, C. S. and Snider, G. L., Science 284 (5412), 289-291 (1999).
8. Powell, C. J. and Jablonski, A., NIST Electron Inelastic-Mean-Free-Path Database - Version 1.2. (National Institute of Standards and Technology, Gaithersburg, MD, 2010).
9. Prutton, M., Larson, L. A. and Poppa, H., Journal of Applied Physics 54 (1), 374381 (1983).
10. Thomas, S., Journal of Applied Physics 45 (1), 161166 (1974).
11. Ichimura, S. and Shimizu, R., Journal of Applied Physics 50 (9), 60206022 (1979).
12. Pantano, C. G. and Madey, T. E., Applied Surface Science 7 (1-2), 115141 (1981).
13. Cazaux, J., Surface Science 125 (2), 335354 (1983).
14. Seah, M. P., Surface and Interface Analysis 33 (12), 950953 (2002).
15. Drouin, D., Couture, A. R., Joly, D., Tastet, X., Aimez, V. and Gauvin, R., Scanning 29 (3), 92101 (2007).
16. Jablonski, A. and Powell, C. J., NIST Backscattering-Correction-Factor Database for Auger Electron Spectroscopy, Version 1.0. (National Institute of Standards and Technology, Gaithersburg, Maryland, 2011).
17. Leite, M. S., Gray, J. L., Hull, R., Floro, J. A., Magalhaes-Paniago, R. and Medeiros-Ribeiro, G., Physical Review B 73 (12), 4 (2006).
18. Cullis, A. G., Robbins, D. J., Pidduck, A. J. and Smith, P. W., Journal of Crystal Growth 123 (3-4), 333343 (1992).
19. Spencer, B. J., Voorhees, P. W. and Tersoff, J., Physical Review B 64 (23), 31 (2001).
20. Wu, C. C. and Hull, R., Journal of Applied Physics 100 (8) (2006).

Keywords

Nano-scale Chemistry of Complex Self-Assembled Nanostructures in Epitaxial SiGe Films

  • Prabhu Balasubramanian (a1), Jerrold A. Floro (a2), Jennifer L. Gray (a3) and Robert Hull (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed