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Nanofabrication of Vertically Aligned Carbon Nanofibers for Contact Characterization

  • Yusuke Ominami (a1), Quoc Ngo (a2), Makoto Suzuki (a3), Kevin Mcilwrath (a4), Konrad Jarausch (a4), Alan M Cassell (a5), Jun Li (a5) and Cary Y Yang (a6)...

Abstract

Recent studies in nanostructural characterization for on-chip interconnect applications using carbon nanofibers (CNFs) are presented. In this paper, we propose a novel technique, for the purpose of characterizing interfacial structures of vertically aligned CNFs for cross-sectional imaging with scanning transmission electron microscopy (STEM). In this technique, vertically aligned CNFs are selectively grown, by plasma-enhanced chemical vapor deposition (PECVD), on a substrate comprising a narrow strip (width ~100nm) fabricated by focused ion beam (FIB). Using high-resolution STEM, we show that CNFs with diameters ranging from 10 -100 nm exhibit very similar graphitic layer morphologies at the base contact interface.

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Nanofabrication of Vertically Aligned Carbon Nanofibers for Contact Characterization

  • Yusuke Ominami (a1), Quoc Ngo (a2), Makoto Suzuki (a3), Kevin Mcilwrath (a4), Konrad Jarausch (a4), Alan M Cassell (a5), Jun Li (a5) and Cary Y Yang (a6)...

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