Skip to main content Accessibility help
×
Home

Nanofabrication of Diamond-like Carbon Templates for Nanoimprint Lithography

  • L. Tao (a1), S. Ramachandran (a2), C. T. Nelson (a3), L. J. Overzet (a4), M. J. Goeckner (a5), G. S. Lee (a6) and W. Hu (a7)...

Abstract

Diamond like carbon (DLC) films were deposited on Si and then patterned to form 40 nm features as nanoimprint templates. A plasma enhanced chemical vapor deposition (PECVD) system with CH4 precursor was used to deposit DLC films on Si and quartz substrates. Then these films were characterized using Raman spectroscopy, atomic force microscopy (AFM), nanoindentation, and contact angle measurement. By varying the RF power and pressure of the PECVD, DLC films with good uniformity, smooth surfaces (<0.2 nm RMS), low surface energy (∼40 mJ/m2), and high hardness (∼22 GPa) were achieved. Nanoimprint lithography and liftoff process were used to pattern Cr mask on DLC films. An inductively coupled plasma (ICP) etching process was performed with CF4 to transfer the patterns into the DLC films to form nanostructured template for nanoimprint. Water contact angles on the patterned DLC templates were measured and it was stable at about 70° under thermal annealing at 180 °C for more than 12 hours. With these DLC templates, UV and reversal UV nanoimprint lithography were carried out on SU-8 at typical imprint conditions and then the fidelity of pattern-transfer was investigated. These experimental results indicate that DLC is an excellent material for nanoimprint templates because of its high wear resistance, robust low surface energy, UV transparency, and ease of patterning.

Copyright

References

Hide All
1. Austin, M. D., Ge, H. X., Wu, W., Li, M. T., Yu, Z. N., Wasserman, D., Lyon, S. A., and Chou, S. Y., Appl. Phys. Lett. 84 (26), 5299 (2004).
2. 2005 International Technology Roadmap for Semiconductors, see http:// www.public.net/itrs
3. Bailey, T., Choi, B. J., Colburn, M., Meissl, M., Shaya, S., Ekerdt, J. G., Sreenivasan, S. V., and Willson, C. G., J. Vac. Sci. Technol. B 18, 3572 (2000)10.1116/1.1324618
4. Jaszewski, R. W., Schift, H., Schnyder, B., Schneuwly, A., and Groning, P., Appl. Surf. Sci. 143, 301 (1999)
5. Lister, K. A., Thoms, S., Macintyre, D. S., Wilkinson, C. D. W., Weaver, J. M. R., and Casey, B. G., J. Vac. Sci. Technol. B 22, 3257 (2004).
6. Pang, S. W., Tamamura, T., Nakao, M., Ozawa, A., and Masuda, H., J. Vac. Sci. Technol. B 16, 1145 (1998).
7. Robertson, J., Pure Appl. Chem., Vol. 66, No. 9, pp.17891796, 1994.
8. Ramachandran, S., Tao, L., Lee, T. H., Sant, S., Overzet, L. J., Goeckner, M. J., Kim, M. J., Lee, G. S., and HuJ, W.. Vac. Sci. Technol. B, Vol.24, No. 6, Nov/Dec 2006
9. Hu, W., Yang, B., Peng, C., and Pang, S. W., J. Vac. Sci. Technol. B. pp. 22252229, 2006.
10. Casiraghi, C., Piazza, F., Ferrari, A. C., Grambole, D., and Robertson, J., Diamond Relat. Mater. 14, 1098 (2005)
11. Owens, D. K. and Wendt, R. C., J. Appl. Polym. Sci. 13, 1741 (1969).

Keywords

Nanofabrication of Diamond-like Carbon Templates for Nanoimprint Lithography

  • L. Tao (a1), S. Ramachandran (a2), C. T. Nelson (a3), L. J. Overzet (a4), M. J. Goeckner (a5), G. S. Lee (a6) and W. Hu (a7)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed