Skip to main content Accessibility help

Nanocrystalline Undoped Silicon Films Produce by Hot Wire Plasma Assisted Technique

  • Isabel M.M. Ferreira (a1), Rodrigo F. P. Martins (a1), Ana M. F. Cabrita (a1), Elvira M. C. Fortunato (a1) and Paula Vilarinho (a2)...


In this work, we show results concerning electro-optical properties, composition and morphology of nanocrystalline hydrogenated undoped silicon (nc-Si:H) films produced by hot wire plasma assisted chemical vapour deposition process (HWPA-CVD) and exhibiting a compact granular structure, as revealed by SEM micrographs. This was also inferred by infrared spectra, which does not present the SiO vibration band located at 1050-1200 cm-1, even when samples have long atmospheric exposition. The photoconductivity measured at room temperature also does not change when samples have a long time exposition to the air or to the light irradiation. The influence of hydrogen dilution on the properties of the films was also investigated.



Hide All
1. Usui, S. and Kikuchi, M., J. Non-Cryst Sol., 34, 1 (1979).
2. Fisher, D., Kepner, H., Finger, F., Prasad, K., and Shah, A., In Proc. ff 10th EPVSEC, p.221 (1991).
3. Ferreira, I., Àguas, H., Mendes, L., Fernandes, F., Fortunato, E. and Martins, R., Mat. Res. Soc. Symp. Proc. Vol 507, p. 607 (1998).
4. Chattopadhyay, S., Das, D., Sharma, S. N., Barua, A. K., Banerjee, R. and Kshirsagar, S., Jpn. P. Appl. Phys. 44, 5743 (1995).
5. Langford, A. A., Fleet, M. L., Nelsom, B. P., Langford, W. A. and Maley, N., Phys. Rev B, 45, 13367 (1992).
6. Molenbroek, E. C., Mahan, A. H., and Gallagher, A., J. Appl. Phys., 82, 1909 (1997).
7. Shirai, I., Hanna, J., and Shimizu, I., Jpn. J Appl. Phys. Part2 30, L679 (1991).
8. Doyle, J., Robertson, R., Lin, G. H., He, M. Z., Gallagher, A., J. Appl. Phys. 64, 3215 (1988).
9.J. Tauc: In Photo and Thermal Electric Effects in Semiconductors, ed by Tauc, J. (Pergamon Press, New York, 1962).
10. Middya, A. R., Guillet, J., Brenot, R., Perrin, J., Bouree, J. E., C. Longeaud and Kleider, J. P., Mat. Res. Soc. Symp. Proc. Vol 467, p.271 (1997).
11. Feenstra, K. F., in PhD Thesis, 1998.
12. Brogueira, P., in PhD Thesis, 1997.
Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

MRS Online Proceedings Library (OPL)
  • ISSN: -
  • EISSN: 1946-4274
  • URL: /core/journals/mrs-online-proceedings-library-archive
Please enter your name
Please enter a valid email address
Who would you like to send this to? *


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed