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Nano-Creep Test for Anatase Polycrystalline Films

Published online by Cambridge University Press:  21 March 2011

Hironori Sugata ,
Shigeo Ohshio  and
Hidetoshi Saitoh
Hironori Sugata
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata, 940-2188, JAPAN
Shigeo Ohshio
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata, 940-2188, JAPAN
Hidetoshi Saitoh
Affiliation:
Department of Chemistry, Nagaoka University of Technology, Nagaoka, Niigata, 940-2188, JAPAN
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Abstract

We introduce an analytical technique for time-dependent deformation behavior of the polycrystalline films using a nano-indenter. This technique permits evaluation of structural deformation of the nanometer scale of the thin films. In this paper, good accuracy conditions were determined to measure deformation behavior of the polycrystalline films. The polycrystalline films of anatase were used to investigate the grain boundary structure. We prove that the analysis of time-dependent deformation behavior is effective to investigate the structure of the polycrystalline films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L4.7.1
Copyright
Copyright © Materials Research Society 2002

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References

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