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Nanochannel Glass Replica Membranes for Parallel Patterning Applications

Published online by Cambridge University Press:  10 February 2011

D. H. Pearson ,
R. J. Tonucci  and
C. R. Eddy Jr
D. H. Pearson
Affiliation:
Naval Research Laboratory, Code 5614, Washington DC 20375
R. J. Tonucci
Affiliation:
Naval Research Laboratory, Code 5614, Washington DC 20375
C. R. Eddy Jr
Affiliation:
Code 6671
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Abstract

Nanochannel glass replica membranes are thin metallic films containing patterned arrays of uniform, nanometer-scale voids whose sizes, positions, geometric patterns, and packing densities may be controlled to a high degree. These membranes have been prepared from refractory and noble metals and are well suited for use as shadow masks in a variety of substrate patterning applications. Here we describe their use in the sub-micron, parallel patterning of Si and GaAs by materials deposition and reactive-ion etching respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 431: Symposium P – Microporous and Macroporous Materials , 1996 , 355
Copyright
Copyright © Materials Research Society 1996

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