Hostname: page-component-8448b6f56d-qsmjn Total loading time: 0 Render date: 2024-04-25T01:27:35.454Z Has data issue: false hasContentIssue false
  • English
  • Français

Multilayer Microelectromechanical Structures for Material Property Characterization

Published online by Cambridge University Press:  10 February 2011

R. I. Pratt  and
G. C. Johnson
R. I. Pratt
Affiliation:
Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740
G. C. Johnson
Affiliation:
Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740
Get access

Abstract

A new class of micro-electro-mechanical systems (MEMS) for material characterization is presented. These multilayered structures are lateral resonators which allow the determination of material properties of the different materials making up the system. Of particular significance is the ability to characterize many new materials previously untestable by resonant techniques. The basic lateral resonant structures are made of a single material, usually doped polycrystalline silicon, with beams anchored to the substrate at one end and supporting a rigid mass at the other. The rigid mass has a comb-shaped region on each side for electrostatically actuating and sensing the motion. The use of this electrostatic comb drive requires that the structure be made of a material that is electrically conductive. Thus, the class of materials which is amenable to characterization by resonance techniques has been somewhat limited. Multilayer structures, tested in conjunction with these basic monolithic structures, permit properties of both the base material and the subsequent layers to be determined. Stiffness and mass density of many new materials can be obtained by comparing the behavior of multilayer structures with their single-layer counterparts. Experimental designs and the associated analytical techniques for obtaining various properties are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 15
Copyright
Copyright © Materials Research Society 1998

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Senturia, S. D., Proceedings, 4th Intl. Conf. on Solid-State Sensors and Actuators (Transducers '87), pp. 11–16. June 1987.Google Scholar
[2] Tang, W. C., Nguyen, T. C. H., Judy, M. W. and Howe, R. T., Sensors and Actuators, A21–A23, pp.328–331, February 1990.Google Scholar
[3] Pratt, R. I., Johnson, G.C., Howe, R. T. and Chang, J. C., Proceedings, 6th Intl. Conf. on Solid-State Sensors and Actuators (Transducers '91), pp. 205–208, June 1991.Google Scholar
[4] Pratt, R. I., Johnson, G. C., Howe, R. T. and Nikkel, D. J. Jr., Mat. Res. Soc. Proc., Volume 276, pp. 197–202, 1992.Google Scholar
[5] Meirovitch, L., Analytical Methods in Vibration, Macmillan Publishing Co. Inc., New York, 1967, pp.207–208.Google Scholar