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Morphology of E-Beam Evaporated Cr Thin Films
Published online by Cambridge University Press: 21 February 2011
Abstract
Studies were made of the structural dependence on the growth rate and substrate temperature of Cr thin films prepared by e-beam evaporation. The d-spacings and the average size of the crystallites were determined from large angle x-ray scattering spectra. Detailed studies of the morphology were made by cross-sectional high resolution transmission electron microscopy.
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- Copyright © Materials Research Society 1990
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