Skip to main content Accessibility help
×
Home

Morphology and Microstructure of (111) Crystalline CeO2 Films Grown on Amorphous SiO2 Substrates by Pulsed-Laser Ablation

  • S. Zhu (a1), Douglas H. Lowndes (a1), J.D. Budai (a1), T. Thundat (a2), D.P. Norton (a1) and R.J. Warmack (a2)...

Abstract

The surface morphology and microstructure of (lll)-oriented CeO2 thin films, grown on amorphous fused silica (S1O2) substrates by low-energy-ion-beam assisted pulsed laser ablation, have been studied by atomic force microscopy (AFM) and x-ray diffraction (XRD). These CeO2 films are aligned with respect to a single in-plane axis despite being deposited on an amorphous substrate. There is a honeycomb-like growth morphology to the films and island-growth can be observed in thicker films. These islands, inside of which are high density of honeycomb-like clusters, are separated by a void network with ∼700nm width. However, on the surface of the thinnest film (∼3nm), only very small clusters (diameter <60nm) appear, and the boundaries of the void network are undefined, which implies that the film is just beginning to coalesce into clusters (grains). The combined AFM images and XRD pattern suggest these clusters probably are the initial seeds for the subsequent island growth. Based on these results, the growth mechanism of oriented CeO2 films on amorphous fused silica substrates is discussed.

Copyright

References

Hide All
1 Harper, J.M.E., Cuomo, J.J., and Gambino, R.J., in Ion Bomvardment Modification of Surfaces: Fundamentals and Applications, edited by Auciello, O. and Kelly, R. (Elsevier, Amsterdam, 1984), and references therein.
2 Weissmantel, C., Thin Solid Films 32, 11 (1976).
3 Iijima, Y., Tanabe, N., Kohno, O., and Ikeno, Y., Appl. Phys. Lett. 60, 769 (1992).
4 Reade, R.P., Berdahl, P., Russo, R.E., and Garrison, S.M., Appl. Phys. Lett. 61, 2231 (1992).
5 Zhu, S., Lowndes, D.H., Budai, J.D., and Norton, D.P., Appl. Phys. Lett. 65, 2012 (1994).
6 Wu, X.D., Foltyn, S.R., Arendt, P., Townsend, J., Adams, C., Compbell, I.H., Tiwari, P., Coulter, Y., and Peterson, D.E., Appl. Phys. Lett. 65, 1961 (1994).
7 Chatterjee, R., Fudutomi, M., Aoki, S., Togano, K., and Maeda, H., Appl. Phys. Lett. 65, 109 (1994).
8 Müller, K-H., J. Vac. Sei. Technol. A 4, 184 (1986).
9 Thornton, J.A., J. Vac. Sei. Technol. A 6, 3059 (1986).
10 Messier, R., Giri, A.P., and Roy, R.A., J. Vac. Sei. Technol. A 2, 500 (1984).
11 Mayer, T.M., Chason, E., and Howard, A.J., J. Appl. Phys. 76, 1633 (1994).
12 Snoeks, E., Polman, A., and Volkert, C.A., Appl. Phys. Lett. 65, 2487 (1994).
13 Superconductive Components, Inc., Columbus, OH.
14 Ion Tech., Inc., Ft. Collins, CO.R.M. Bradley, p. 300 in Handbook of Ion Beam Processing Technology, ed. by Cuomo, J.J., Rossnagel, S.M., and Kaufman, H.R., Noyes Publications, Park Ridge, NJ, 1989.
16 Girard, J.C., Samson, Y., Gauthier, S., Rousset, S., and Klein, J., Surface Science 302, 73 (1994).
17 Okuno, S.N., Hashimoto, S., and Inomata, D., J. Appl. Phys. 71, 5926 (1994).
18 Zalm, P.C., p. 78 in Handbook of Ion Beam Processing Technology, ed. by Cuomo, J.J., Rossnagel, S.M., and Kaufman, H.R., Noyes Publications, Park Ridge, NJ, 1989.
19 Kester, D. and Messier, R., J. Mater. Res. 8, 1938 (1993).

Morphology and Microstructure of (111) Crystalline CeO2 Films Grown on Amorphous SiO2 Substrates by Pulsed-Laser Ablation

  • S. Zhu (a1), Douglas H. Lowndes (a1), J.D. Budai (a1), T. Thundat (a2), D.P. Norton (a1) and R.J. Warmack (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed